TY  - JOUR
A1  - Lüth, H.
A1  - Thust, M.
A1  - Steffen, A.
A1  - Kordos, P.
A1  - Schöning, Michael Josef
T1  - Biochemical sensors with structured and porous silicon capacitors
JF  - Materials Science and Engineering B. 69-70 (2000)
Y1  - 2000
SN  - 0921-5107
SP  - 104
EP  - 108
ER  - 
TY  - JOUR
A1  - Emons, H.
A1  - Glück, O.
A1  - Hüllenkremer, B.
A1  - Schöning, Michael Josef
T1  - Voltohmmetry as an alternative detection method at polycrystalline metal film electrodes
JF  - Electroanalysis. 13 (2001), H. 8-9
Y1  - 2001
SN  - 1040-0397
SP  - 677
EP  - 680
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Ronkel, F.
A1  - Crott, M.
A1  - Thust, M. (u.a.)
T1  - Miniaturization of potentiometric sensors using porous silicon microtechnology
JF  - Electrochimica Acta. 42 (1997), H. 22
Y1  - 1997
SN  - 0013-4686
SP  - 3185
EP  - 3193
ER  - 
TY  - JOUR
A1  - Schroth, P.
A1  - Schöning, Michael Josef
A1  - Schütz, S.
A1  - Malkoc, Ü.
A1  - Steffen, A.
A1  - Marso, M.
A1  - Hummel, Hans E.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Coupling of insect antennae to field-effect transistors for biochemical sensing
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3821
EP  - 3826
ER  - 
TY  - JOUR
A1  - Glück, O.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Otto, A.
A1  - Emons, H.
T1  - Trace metal determination by dc resistance changes of microstructured thin gold film electrodes
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3761
EP  - 3768
ER  - 
TY  - JOUR
A1  - Schmitt, G.
A1  - Schultze, J.-W.
A1  - Faßbender, F.
A1  - Buß, G.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Passivation and corrosion of microelectrode arrays
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3865
EP  - 3883
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Buß, G.
A1  - Lüth, H.
A1  - Schultze, J.W.
T1  - Modifications and characterization of a silicon-based microelectrode array
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3899
EP  - 3910
ER  - 
TY  - JOUR
A1  - Poghossian, Arshak
A1  - Thust, M.
A1  - Schroth, P.
A1  - Steffen, A.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Penicillin detection by means of silicon-based field-effect structures
JF  - Sensors and Materials. 13 (2001), H. 4
Y1  - 2001
SN  - 0392-2510
SP  - 207
EP  - 223
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, Anette
A1  - Ruge, Christian
A1  - Ecken, Holger
A1  - Müller-Veggian, Mattea
A1  - Lüth, Hans
T1  - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
JF  - Sensors. 2 (2002), H. 1
N2  - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Y1  - 2002
SN  - 1424-8220
U6  - http://dx.doi.org/10.3390/s20100011
SP  - 11
EP  - 22
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Krings, T.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - A „hybrid“ thin-film pH sensor with integrated thick-film reference
JF  - Sensors. 1 (2001), H. 6
Y1  - 2001
SN  - 1424-8220
SP  - 183
EP  - 192
ER  -