TY - JOUR A1 - Schöning, Michael Josef T1 - Silicon-based biochemical sensors JF - CNI - The Center of Nanoelectronic Systems for Information Technology Y1 - 2003 SP - 165 EP - 170 PB - Foschungszentrum Jülich ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Microfabricated semiconductor structures – Advances in (bio-)chemical sensing JF - Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed. Y1 - 2002 SN - 3-540-43699-5 SP - 79 EP - 92 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, Joachim P. A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Biocybernetics and Biomedical Engineering. 21 (2001), H. 4 Y1 - 2001 SN - 0208-5216 SP - 107 EP - 119 ER -