TY - CHAP A1 - Schöning, Michael Josef A1 - Abouzar, Maryam H. A1 - Wagner, Torsten A1 - Näther, Niko A1 - Rolka, David A1 - Yoshinobu, Tatsuo A1 - Kloock, Joachim P. A1 - Turek, Monika A1 - Ingebrandt, Sven A1 - Poghossian, Arshak T1 - A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices T2 - MRS Proceedings Y1 - 2006 U6 - http://dx.doi.org/10.1557/PROC-0952-F08-02 N1 - Vol. 952 - Symposium F - Integrated Nanosensors SP - 1 EP - 9 ER -