TY  - JOUR
A1  - Hagemann, Hans-Jürgen
A1  - Geittner, P.
A1  - Warnier, J.
A1  - Weling, F.
T1  - Reduction of geometric taper losses in the PCVD process. Geittner, P.; Hagemann, H. J.; Warnier, J.; Weling, F.; Wilson, H.
JF  - Electronics letters : an intern. publication / The Institution of Electrical Engineers. 21 (1985), H. 13
Y1  - 1985
SN  - 0013-5194
SP  - 870
EP  - 871
ER  -