TY - JOUR A1 - Wissen, M. A1 - Bogdanski, N. A1 - Scheer, H.-C. A1 - Bitz, Andreas A1 - Ahrens, G. A1 - Gruetzner, G. T1 - Implication of the light polarisation for UV curing of pre-patterned resists JF - Microelectronic Engineering Y1 - 2005 U6 - http://dx.doi.org/10.1016/j.mee.2004.12.099 SN - 0167-9317 VL - 78-79 SP - 659 EP - 664 ER -