TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, J A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Lecture Notes of the ICB Seminars Y1 - 2002 SP - 55 EP - 66 PB - MCB CY - Warsaw ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Mourzina, Y.G. A1 - Ermolenko, Y. A1 - Doll, T. A1 - Schubert, J. A1 - Schöning, Michael Josef T1 - Inorganic thin-film sensor membranes with PLD-prepared chalcogenide glasses: Challenges and implementation JF - Sensors. 4 (2004), H. 10 Y1 - 2004 SN - 1424-8220 SP - 156 EP - 162 ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Mourzina, Y. A1 - Schubert, J. A1 - Ermelenko, Y. A1 - Schöning, Michael Josef T1 - Pulsed laser deposition: A tool for fabricating thin-film microsensors JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 1032 EP - 1033 ER - TY - JOUR A1 - Vlasov, Y. G. A1 - Mourzina, Y. G. A1 - Legin, A. V. A1 - Ermelenko, Y. E. A1 - Schubert, J. A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition JF - Russian Journal of Applied Chemistry. 75 (2002), H. 3 Y1 - 2002 SN - 1070-4272 SP - 351 EP - 356 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Kloock, Joachim P. A1 - Mourzina, Y. A1 - Schubert, J. T1 - A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials JF - Sensors. 2 (2002), H. 9 Y1 - 2002 SN - 1424-8220 SP - 356 EP - 365 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schmidt, C. A1 - Schubert, J. A1 - Zander, W. A1 - Mesters, S. A1 - Kordos, P. A1 - Lüth, H. A1 - Legin, A. A1 - Seleznev, B. A1 - Vlasov, Y. G. T1 - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 254 EP - 259 ER - TY - JOUR A1 - Mourzina, Y.G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. V. A1 - Vlasov, Y. G. A1 - Kordos, P. A1 - Lüth, H. T1 - A new thin film Pb microsensor based on chalcogenide glasses JF - Sensors and Actuators B. 71 (2000), H. 1-2 Y1 - 2000 SN - 0925-4005 SP - 13 EP - 18 ER - TY - JOUR A1 - Mourzina, Y. G. A1 - Yoshinobu, T. A1 - Schubert, J. A1 - Lüth, H. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - Ion-selective lightaddressable potentiometric sensor (LAPS) with chalcogenide thin film by pulsed laser deposition JF - Sensors and Actuators B. 80 (2001), H. 2 Y1 - 2001 SN - 0925-4005 SP - 136 EP - 140 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Y. G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors? JF - Sensors and Actuators B. 78 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 N1 - Selected Papers form Eurosensors XIV SP - 273 EP - 278 ER - TY - JOUR A1 - Schubert, J. A1 - Schöning, Michael Josef A1 - Mourzina, Y. G. A1 - Legin, A. V. A1 - Vlasov, Y. G. A1 - Zander, W. A1 - Lüth, H. T1 - Multicomponent thin films for electrochemical sensor applications prepared by pulsed laser deposition JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 327 EP - 330 ER - TY - JOUR A1 - Mourzina, Yu. G. A1 - Schubert, J A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Development of multisensor systems based on chalcogenide thin film chemical sensors for the simultaneous multicomponent analysis of metal ions in complex solutions JF - Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz Y1 - 2001 SN - 0-08-044014-2 SP - 251 EP - 263 PB - Elsevier [u.a.] CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Mourzina, Y. G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. V. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Copper, cadmium and thallium thin film sensors based on chalcogenide glasses JF - Analytica Chimica Acta. 433 (2001) Y1 - 2001 SN - 0378-4304 SP - 103 EP - 110 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Yu.G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Pulsed laser deposition – an innovative technique for preparing inorganic thin films JF - Electroanalysis. 13 (2001), H. 8-9 Y1 - 2001 SN - 1040-0397 SP - 727 EP - 732 ER - TY - JOUR A1 - Schubert, J. A1 - Schöning, Michael Josef A1 - Schmidt, C. A1 - Siegert, M. A1 - Mesters, S. A1 - Zander, W. A1 - Kordos, P. A1 - Lüth, H. A1 - Legin, A. A1 - Mourzina, Y. G. A1 - Seleznev, B. A1 - Vlasov, Y. G. T1 - Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique JF - Applied Physics A. 69, (1999), H. Supplement 1 Y1 - 1999 SN - 0947-8396 U6 - http://dx.doi.org/10.1007/s003390051534 SP - 803 EP - 805 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schmidt, C. A1 - Schubert, J. A1 - Zander, W. A1 - Kordos, P. A1 - Lüth, H. A1 - Legin, A. A1 - Seleznev, B. A1 - Vlasov, Y. G. T1 - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique JF - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1. Y1 - 1999 SN - 90-76699-02-X N1 - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague) SP - 847 EP - 850 CY - The Hague, The Netherlands ER - TY - JOUR A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Lüth, H. T1 - Thin film chemical sensors based on chalcogenide glasses for „electronic tongue“ applications JF - Sensor 2001 : 10th international conference, May 8 - 10, 2001, Exhibition Centre Nuremberg, Germany ; proceedings Y1 - 2001 N1 - Sensor-Kongress ; (10, 2001, Nürnberg) Sensor 2001 Conference ; (10 : ; 2001.05.08-10 : ; Nuremberg) SP - 137 EP - 141 PB - AMA Service CY - Wunstorf ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Y. G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors? JF - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...] Y1 - 2000 SN - 87-89935-50-0 N1 - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen) SP - 615 EP - 618 PB - MIC, Mikroelektronik Centret CY - Lyngby, Denmark ER - TY - JOUR A1 - Mourzina, Yu.G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Thin film microsensors for fast heavy metal analysis JF - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...] Y1 - 2000 SN - 87-89935-50-0 N1 - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen) SP - 839 EP - 840 PB - MIC, Mikroelektronik Centret CY - Lyngby, Denmark ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Beckers, L. A1 - Schaub, A. A1 - Zander, W. A1 - Schubert, J. A1 - Mesters, S. A1 - Kordos, P. A1 - Lüth, H. T1 - A novel silicon-based pH sensor prepared by pulsed laser deposition technique JF - Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium / [KU Leuven]. Puers, Robert. Vol. 3. Y1 - 1996 SN - 90-803282-1-9 N1 - Eurosensors ; (10, 1996, Louvain) Eurosensors, the European Conference on Solid-State Transducers ; (10 : ; 1996.09.08-11 : ; Leuven) SP - 781 EP - 784 PB - Catholic University Leuven CY - Heverlee, Belgium ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schaub, A. A1 - Zundel, A. A1 - Beckers, L. A1 - Schubert, J. A1 - Zander, W. A1 - Kordos, P. A1 - Lüth, H. T1 - Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors JF - Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff Y1 - 1995 SN - 2-86332-182-X N1 - ESSDERC ; (25, 1995, 's-Gravenhage) ; European Solid State Device Research Conference (ESSDERC) ; (25 : ; 1995.09.25-27 : ; Den Haag) SP - 601 EP - 604 PB - Ed. Frontières CY - Gif-sur-Yvette ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Yoshinobu, T. A1 - Schubert, J. A1 - Steffen, A. A1 - Lüth, H. T1 - Innovative Schichttechniken und Messprinzipien für kapazitive Feldeffektsensoren JF - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl .... Y1 - 2002 SN - 3-8007-2675-0 N1 - Sensoren und Mess-Systeme 2002 SP - 151 EP - 154 PB - VDE-Verl. CY - Berlin [u.a.] ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Mourzina, Y.G. A1 - Yoshinobu, T. A1 - Schubert, J. A1 - Schöning, Michael Josef T1 - Chalkogenidglassensoren für die Schwermetallanalytik JF - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl .... Y1 - 2002 SN - 3-8007-2675-0 N1 - Sensoren und Mess-Systeme 2002 SP - 395 EP - 398 PB - VDE-Verl. CY - Berlin [u.a.] ER - TY - JOUR A1 - Buniatyan, Vahe V. A1 - Matirosyan, N. A1 - Abouzar, Maryam H. A1 - Schubert, J. A1 - Zander, W. A1 - Gevorgian, S. A1 - Schöning, Michael Josef A1 - Poghossian, Arshak T1 - Capacitive field-effect pH sensor based on an electrolyte-ferroelectric-insulator-semiconductor structure JF - SENSOR 2009 : : 14th International Conference on Sensors, Technologies, Electronics and Applications; Nürnberg, Germany, 26 - 28 May 2009; proceedings; [part of] Sensor + Test Conference 2009 / AMA, Fachverband für Sensorik e.V Y1 - 2009 SN - 9783981099355 N1 - AMA, Fachverband für Sensorik ; Sensor International Conference ; (14 : ; 2009.05.26-28 : ; Nürnberg) SP - 317 EP - 322 PB - AMA Service CY - Wunstorf ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Turek, M. A1 - Heiden, W. A1 - Riesen, A. A1 - Chhabda, T. A. A1 - Schubert, J. A1 - Krüger, P. A1 - Keusgen, M. T1 - Artificial intelligence/fuzzy logic method for analysis of combined signals from heavy metal chemical sensors JF - Electrochimica Acta. 54 (2009), H. 25 Sp. Iss. SI Y1 - 2009 SN - 0013-4686 SP - 6082 EP - 6088 PB - Elsevier CY - New York ER - TY - JOUR A1 - Buniatyan, V. V. A1 - Matirosyan, N. W. A1 - Abouzar, Maryam H. A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schubert, J. A1 - Khachatryan, V. R. A1 - Soukiassyan, G. R. T1 - (Ba,Sr)TiO3 based electrolyte-insulator-semiconductor pHsensors: comparitive study JF - Semiconductor micro- and nanoelectronics : Proceedings of the Seventh International Conference , Tsakhcadzor, Armenia July 3-5 2009 Y1 - 2009 SP - 71 EP - 74 ER - TY - JOUR A1 - Iken, Heiko A1 - Ahlborn, K. A1 - Gerlach, F. A1 - Vonau, W. A1 - Zander, W. A1 - Schubert, J. A1 - Schöning, Michael Josef T1 - Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors JF - Electrochimica acta Y1 - 2013 SN - 1873-3859 (E-Journal); 0013-4686 (Print) SP - Available online 30.8.2013 PB - Elsevier CY - Amsterdam ER - TY - CHAP A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Bäcker, Matthias A1 - Zander, W. A1 - Schubert, J. A1 - Sukoyan, L. H. A1 - Begoyan, V. A1 - Buniatyan, V. V. A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Chemische Sensoren mit Bariumstrontiumtitanat als funktionelle Schicht zur Multiparameterdetektion T2 - 11. Dresdner Sensor-Symposium : 9.-11.12.2013 Y1 - 2013 SN - 978-3-9813484-5-3 SP - 368 EP - 372 ER - TY - JOUR A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Bäcker, Matthias A1 - Chaudhuri, S. A1 - Zander, W. A1 - Schubert, J. A1 - Begoyan, V. K. A1 - Buniatyan, V. V. A1 - Wagner, P. A1 - Schöning, Michael Josef T1 - Capacitively coupled electrolyte-conductivity sensor based on high-k material of barium strontium titanate JF - Sensors and actuators. B: Chemical Y1 - 2014 U6 - http://dx.doi.org/10.1016/j.snb.2014.02.103 SN - 1873-3077 (E-Journal); 0925-4005 (Print) IS - 198 SP - 102 EP - 109 PB - Elsevier CY - Amsterdam ER - TY - JOUR A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Bäcker, Matthias A1 - Reisert, Steffen A1 - Schubert, J. A1 - Zander, W. A1 - Begoyan, V. K. A1 - Buniatyan, V. V. A1 - Schöning, Michael Josef T1 - Chemical sensors based on a high-k perovskite oxide of barium strontium titanate JF - Procedia Engineering N2 - High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors for liquids. In this work, BST films have been applied as a sensitive transducer material for a label-free detection of adsorbed charged macromolecules (positively charged polyelectrolytes) and concentration of hydrogen peroxide vapor as well as protection insulator layer for a contactless electrolyte-conductivity sensor. The experimental results of characterization of individual sensors are presented. Special emphasis is devoted towards the development of a capacitively-coupled contactless electrolyte-conductivity sensor. KW - barium strontium titanate KW - high-k material KW - contactless conductivity sensor KW - multi-functional material KW - hydrogen peroxide Y1 - 2014 U6 - http://dx.doi.org/10.1016/j.proeng.2014.11.258 SN - 1877-7058 N1 - EUROSENSORS 2014 ; European Conference on Solid-State Transducers <28, 2014> VL - 87 SP - 28 EP - 31 PB - Elsevier CY - Amsterdam ER - TY - CHAP A1 - Kloock, Joachim P. A1 - Schubert, J. A1 - Ermelenko, Y. A1 - Vlasov, Y. G. A1 - Bratov, A. A1 - Schöning, Michael Josef T1 - Thin-film sensors with chalcogenide glass materials – a general survey T2 - Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ... Y1 - 2006 SP - 92 EP - 97 CY - Warsaw ER -