TY  - JOUR
A1  - Kloock, Joachim P.
A1  - Poghossian, Arshak
A1  - Schumacher, K.
A1  - Rosenkranz, C.
A1  - Schultze, J. W.
A1  - Müller-Veggian, Mattea
A1  - Schöning, Michael Josef
T1  - Funktionsprüfung und Charakterisierung von ionensensitiven Feldeffekttransistoren (ISFETs) auf Waferebene mittels Mikrotropfenzelle für den zukünftigen Einsatz in der Sensorproduktion
JF  - Sensoren und Messsysteme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14. März 2006 in Freiburg/Breisgau / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ; VDE/VDI-Gesellschaft Mess- und Automatisierungstechnik (GMA). Wiss. Tagungsleitung: L. M. Reindl
Y1  - 2006
SN  - 3-8007-2939-3
N1  - Fachtagung Sensoren und Messsysteme <13, 2006, Freiburg, Breisgau>
SP  - 257
EP  - 260
PB  - VDE-Verl.
CY  - Berlin
ER  - 
TY  - CHAP
A1  - Schöning, Michael Josef
A1  - Abouzar, Maryam H.
A1  - Wagner, Torsten
A1  - Näther, Niko
A1  - Rolka, David
A1  - Yoshinobu, Tatsuo
A1  - Kloock, Joachim P.
A1  - Turek, Monika
A1  - Ingebrandt, Sven
A1  - Poghossian, Arshak
T1  - A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices
T2  - MRS Proceedings
Y1  - 2006
U6  - http://dx.doi.org/10.1557/PROC-0952-F08-02
N1  - Vol. 952 - Symposium F - Integrated Nanosensors
SP  - 1
EP  - 9
ER  - 
TY  - CHAP
A1  - Poghossian, Arshak
A1  - Schumacher, Kerstin
A1  - Kloock, Joachim P.
A1  - Rosenkranz, Christian
A1  - Schultze, Joachim W.
A1  - Müller-Veggian, Mattea
A1  - Schöning, Michael Josef
T1  - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
N2  - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
KW  - Biosensor
KW  - Biosensorik
KW  - ISFET
KW  - Wafer
KW  - ISFET
KW  - wafer-level testing
KW  - capillary micro-droplet cell
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259
ER  -