TY - GEN A1 - Kämper, Klaus-Peter T1 - Lecture notes Sensors and Actuators N2 - Kennwortgeschützter Zugang nur für Studierende bei Prof. Dr. Klaus-Peter Kämper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format) N2 - Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter Kämper. Winter semester 2007/2008. Version 2007-08-30. 472 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids KW - Sensor KW - Aktor KW - Sensoren KW - Aktoren KW - Sensores KW - Actuators KW - Microfabrication Y1 - 2007 ER - TY - GEN A1 - Kämper, Klaus-Peter T1 - Lecture notes Sensors and Actuators WS 2008/2009 N2 - Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter Kämper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index N2 - Kennwortgeschützter Zugang nur für Studierende bei Prof. Dr. Klaus-Peter Kämper. Wintersemester 2008/2009. 488 Seiten (pdf-Format) KW - Sensor KW - Aktor KW - Sensoren KW - Aktoren KW - Sensores KW - Actuators KW - Microfabrication Y1 - 2008 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Ehrfeld, W. A1 - Michel, F. T1 - LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M. JF - 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN Y1 - 1994 SN - 0780321146 SP - 43 EP - 47 CY - Piscataway, N.J. ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Hagemann, B. A1 - Lehr, H. A1 - Michel, F. T1 - LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C. JF - LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed. Y1 - 1995 N1 - University Enterprise Training Partnership for Micro-Electro-Mechanical Systems SP - 100 EP - 110 PB - FSRM CY - Neuchatel ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schulz, C. A1 - Ehrfeld, W. A1 - Erbel, R. T1 - LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T. JF - 3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...] Y1 - 1994 N1 - Microengineering in Medicine and Biology Training Course 1994, Lausanne PB - REPRO EPFL CY - Lausanne ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Pappas, D. P. A1 - Miller, B. P. A1 - Hopster, H. T1 - Magnetism of ultrathin films of Fe on Cu(100). Pappas, D. P; Kämper, K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Luntz, A. C.; Brundle, C.R.; Shen, Z.-X. JF - Journal of Applied Physics. 69 (1991), H. 8 Y1 - 1991 SN - 1089-7550 SP - 5209 EP - 521 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Hessel, V. A1 - Lacher, M. T1 - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C. JF - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1 Y1 - 1997 SN - 0-7803-3664-X SP - 71 EP - 79 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Clemens, M. A1 - Ehrfeld, W. T1 - Micro gear pumps for dosing of viscous fluids. / Döpper, J. (u.a.) JF - Journal of Micromechanics and Microengineering. 7 (1997), H. 3 Y1 - 1997 SN - 0960-1317 SP - 230 EP - 232 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Abel, S. A1 - Döpper, J. T1 - Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C. JF - Proceedings of the SPIE - The International Society for Optical Engineering Y1 - 1996 SN - 0277-786X N1 - Konferenz-Einzelbericht. SP - 202 EP - 210 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Döpper, J. A1 - Hessel, V. T1 - Microfluidic components for biological and chemical microreactors. Kämper, K.-P.; Ehrfeld, W.; Döpper, J.; Hessel, V.; Lehr, H.; Löwe, H.; Richter, T.; Wolf, A. JF - Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ... Y1 - 1997 SN - 0-7803-3744-1 N1 - International Workshop on Micro-Electro-Mechanical Systems <10, 1997, Nagoya> SP - 338 EP - 343 PB - IEEE Service Center CY - Piscataway, NJ ER -