TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Müller-Veggian, Mattea A1 - Kordos, P. T1 - A novel silicon-based sensor array with capacitive EIS structures JF - Sensors and Actuators B. 47 (1998), H. 1-3 Y1 - 1998 SN - 0925-4005 SP - 225 EP - 230 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - http://dx.doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Simonis, A. A1 - Ruge, C. A1 - Müller-Veggian, Mattea A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - A long-term stable macroporoustype EIS structure for electrochemical sensor applications JF - Sensors and Actuators B. 91 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 21 EP - 25 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, Jürgen A1 - Zander, Willy A1 - Müller-Veggian, Mattea T1 - Pulsed laser deposition as a novel preparation technique for chemical microsensors JF - Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999) Y1 - 1999 SP - 124 EP - 134 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Steffen, A. A1 - Müller-Veggian, Mattea T1 - Kapazitives Sensorarray in Siliziumtechnik für die Prozeßüberwachung JF - ITG-Fachbericht. 148 (1998) Y1 - 1998 SN - 0341-0196 SP - 257 EP - 263 ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Dehnhardt, W. A1 - Merdinger, I.G. A1 - Mills, S. J. T1 - Gammaspektroskopische Untersuchungen vor Yrast-Zuständen in neutronenarmen Ce-Isotopen JF - Jahresbericht / Max-Planck-Institut für Kernphysik Y1 - 1972 PB - MPI CY - Heidelberg ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Dehnhardt, W. A1 - Merdinger, I. G. A1 - Mills, S. J. T1 - Livelli ad alto spin nei nuclei ¹³²,¹³⁴ Ce JF - Bollettino della Società Italiana di Fisica Y1 - 1973 SN - 0037-8801 VL - 1973 SP - 112 PB - Zanichelli CY - Bologna ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Dehnhardt, W. A1 - Mills, J. S. T1 - Untersuchung von Yrast-Kaskaden in geraden Ce-Isotopen JF - Jahresbericht / Max-Planck-Institut für Kernphysik Y1 - 1973 SP - 83 PB - MPI CY - Heidelberg ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Taras, P. A1 - Ward, D. A1 - Andrews, H. E. T1 - Etats "Yrast" a spin eleve dans les isotopes ¹³⁰,¹³²,¹³⁴ Ce JF - Rapport d'activité / Laboratoire de Physique Nucléaire. 9 (1974) Y1 - 1974 N1 - Laboratoire de Physique Nucléaire SP - 44 ER - TY - JOUR A1 - Müller-Veggian, Mattea A1 - Dehnhardt, W. A1 - Mills, J. S. T1 - Yrast cascades in even mass Ce isotopes JF - Bollettino della Società Italiana di Fisica Y1 - 1974 SN - 0037-8801 VL - 1974 SP - 85 PB - Zanichelli CY - Bologna ER -