TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Müller-Veggian, Mattea A1 - Kordos, P. T1 - A novel silicon-based sensor array with capacitive EIS structures JF - Sensors and Actuators B. 47 (1998), H. 1-3 Y1 - 1998 SN - 0925-4005 SP - 225 EP - 230 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Steffen, A. A1 - Müller-Veggian, Mattea T1 - Kapazitives Sensorarray in Siliziumtechnik für die Prozeßüberwachung JF - ITG-Fachbericht. 148 (1998) Y1 - 1998 SN - 0341-0196 SP - 257 EP - 263 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Kordos, P. A1 - Lüth, H. A1 - Ronkel, F. A1 - Schultze, J. W. T1 - Halbleiter-Schichtstrukturen mit porösem Silizium als Chemo- und Biosensoren JF - ITG-Fachbericht. 148 (1998) Y1 - 1998 SN - 0341-0196 SP - 33 EP - 40 ER - TY - JOUR A1 - Thust, M. A1 - Schroth, P. A1 - Töpler, A. A1 - Schöning, Michael Josef A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Improving the detection limit of a capacitive sensor by means of a diffusion barrier JF - Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1 Y1 - 1998 SN - 0-7503-0595-9 N1 - Eurosensors ; (12, 1998, Southampton) ; UK Conference on Sensors and Their Applications ; (9, 1998, Southampton) SP - 507 EP - 510 PB - Inst. of Physics Publ. CY - Bristol [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Malkoc, Ü. A1 - Thust, M. A1 - Steffen, A. A1 - Kordos, P. A1 - Lüth, H. T1 - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors JF - Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou Y1 - 1998 N1 - International Meeting on Chemical Sensors ; (7, 1998, Beijing) ; International Meeting on Chemical Sensors (IMCS) ; (7 : ; 1998.07.27-30 : ; Beijing) SP - 885 EP - 887 PB - Elsevier CY - Amsterdam [u.a.] ER -