TY - JOUR A1 - Kämper, Klaus-Peter A1 - Picard, A. A1 - Schütze, A. A1 - Wallach, D. T1 - Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; Kämper, K.-P.; Schütze, A.; Wallach, D.; Walter, T. JF - Mst-News (2006) Y1 - 2006 SN - 0948-3128 SP - 15, 16 EP - u. 35 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Picard, Antoni A1 - Brill, Manfred A1 - Cassel, Detlef (u.a.) T1 - The Virtual Cleanroom – a new tool in teaching MST process technologies JF - mst news International newsletter on micro - nano Integration (2003) Y1 - 2003 SN - 0948-3128 SP - 35 EP - 36 ER -