TY - CHAP A1 - Poghossian, Arshak A1 - Schumacher, Kerstin A1 - Kloock, Joachim P. A1 - Rosenkranz, Christian A1 - Schultze, Joachim W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell N2 - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors. KW - Biosensor KW - Biosensorik KW - ISFET KW - Wafer KW - ISFET KW - wafer-level testing KW - capillary micro-droplet cell Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259 ER - TY - CHAP A1 - Platen, Johannes A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique N2 - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures. KW - Biosensor KW - Nanostructuring KW - layer expansion KW - pattern-size reduction KW - self-aligned patterning Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Lüth, H. T1 - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters JF - Proceedings of SPIE. 4576 (2002) Y1 - 2002 SP - 149 EP - 159 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, Lars A1 - Lüth, Hans A1 - Schöning, Michael Josef T1 - Novel concepts for flow-rate and flow-direction determination by means of pH-sensitive ISFETs JF - Proceedings of SPIE. 4560 (2001) Y1 - 2001 SP - 19 EP - 27 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Lüth, Hans T1 - Semiconductor-based field-effect structures for chemical sensing Y1 - 2001 SP - 188 EP - 198 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Thust, M. A1 - Schroth, P. A1 - Steffen, A. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Penicillin detection by means of silicon-based field-effect structures JF - Sensors and Materials. 13 (2001), H. 4 Y1 - 2001 SN - 0392-2510 SP - 207 EP - 223 ER - TY - JOUR A1 - Yoshinobu, T. A1 - Ecken, H. A1 - Poghossian, Arshak A1 - Simonis, A. A1 - Iwasaki, H. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Constant-current-mode LAPS (CLAPS) for the detection of penicillin JF - Electroanalysis. 13 (2001), H. 8-9 Y1 - 2001 SN - 1040-0397 SP - 733 EP - 736 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Simonis, A. A1 - Ecken, H. A1 - Lüth, Hans A1 - Schöning, Michael Josef T1 - Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS? JF - Sensors and Actuators B. 78 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 237 EP - 242 ER - TY - JOUR A1 - Yoshinobu, T. A1 - Ecken, H. A1 - Poghossian, Arshak A1 - Lüth, H. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - Alternative sensor materials for light-addressable potentiometric sensors JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 388 EP - 392 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Baade, A. A1 - Emons, H. A1 - Schöning, Michael Josef T1 - Application of ISFET for pH measurements in rain droplets JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 634 EP - 638 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef A1 - Schroth, P. A1 - Simonis, A. A1 - Lüth, H. T1 - An ISFET-based penicillin sensor with high sensitivity, low detection limit and long lifetime JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 519 EP - 526 ER - TY - JOUR A1 - Wagner, Torsten A1 - Beging, Stefan A1 - Rotter, L. A1 - Poghossian, Arshak A1 - Biselli, Manfred A1 - Zang, Werner A1 - Schöning, Michael Josef T1 - Online-Messsysteme für die automatisierte Charakterisierung von feldeffektbasierten Biosensoren JF - 8. Dresdner Sensor-Symposium : Sensoren für Umwelt, Klima und Sicherheit, Biosensoren und Biosysteme, Sensoren und Sensorsysteme für die Prozesstechnik, Trends in der Sensortechnik, Materialentwicklung für die Sensorik; 8. Dresdner Sensor-Symposium, 10. - 12. Dezember 2007, Dresden / Gerald Gerlach ... (Hg.) Y1 - 2007 SN - 978-3-940046-45-1 N1 - Dresdner Sensor-Symposium <8, 2007, Dresden> ; Dresdner Beiträge zur Sensorik ; 29 SP - 257 EP - 260 PB - TUDpress, Verl. der Wissenschaften CY - Dresden ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, Lars A1 - Schöning, Michael Josef T1 - Chemical sensor as physical sensor: ISFET-based flowvelocity, flow-direction and diffusion-coefficient sensor JF - Sensors and Actuators B. 95 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 384 EP - 390 ER - TY - JOUR A1 - Mourzina, Y. A1 - Mai, T. A1 - Poghossian, Arshak A1 - Ermolenko, Y. A1 - Yoshinobu, T. A1 - Vlasov, Y. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - K+-selective field-effect sensors as transducers for bioelectronic applications JF - Electrochimica Acta. 48 (2003), H. 20-22 Y1 - 2003 SN - 0013-4686 SP - 3333 EP - 3339 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Application of a (bio-)chemical sensor (ISFET) for the detection of physical parameters in liquids JF - Electrochimica Acta. 48 (2003), H. 20-22 Y1 - 2003 SP - 3289 EP - 3297 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Platen, J. A1 - Schöning, Michael Josef T1 - Towards self-aligned nanostructures by means of layerexpansion technique JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 SP - 838 EP - 843 ER - TY - JOUR A1 - Näther, Niko A1 - Rolka, David A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Two microcell flow-injection analysis (FIA) platforms for capacitive silicon-based field-effect sensors JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 U6 - https://doi.org/10.1016/j.electacta.2005.04.066 SP - 924 EP - 929 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies JF - Sensors and Actuators B. 108 (2005), H. 1-2 Y1 - 2005 SN - 0925-4005 N1 - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004 SP - 986 EP - 992 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Detecting Both Physical and (Bio-)Chemical Parameters by Means of ISFET Devices JF - Electroanalysis. 16 (2004), H. 22 Y1 - 2004 SN - 1040-0397 SP - 1863 EP - 1872 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Cherstvy, A. A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Possibilities and limitations of label-free detection of DNA hybridization with field-effect-based devices JF - Sensors and Actuators B. 111-112 (2005) Y1 - 2005 SN - 0925-4005 N1 - Eurosensors XVIII 2004 — The 18th European Conference on Solid-State Transducers SP - 470 EP - 480 ER -