TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Weidenbrück, B.
A1  - Thust, M.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - A silicon-based sensor array with capacitive EIS structures
JF  - Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.
Y1  - 1997
SN  - 83-908335-0-6
N1  - Eurosensors ; (11, 1997, Warszawa) ; Eurosensors - European Conference on Solid-State Transducers ; (11 : ; 1997.09.21-24 : ; Warsaw)
SP  - 871
EP  - 874
PB  - Sensor Lab Sp.
CY  - Warsaw
ER  -