TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Lehr, H. A1 - Michel, F. T1 - LIGA-Technik zur Fertigung von Mikroaktoren. Ehrfeld. W.; Kämper, K.-P.; Lehr, H.; Michel, F. JF - Mikroelektronik . 7 (1993), H. 5 Y1 - 1993 SN - 0931-2714 SP - LXIX EP - LXXI ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Ehrfeld, W. A1 - Michel, F. T1 - LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M. JF - 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN Y1 - 1994 SN - 0780321146 SP - 43 EP - 47 CY - Piscataway, N.J. ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Hagemann, B. A1 - Lehr, H. A1 - Michel, F. T1 - LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C. JF - LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed. Y1 - 1995 N1 - University Enterprise Training Partnership for Micro-Electro-Mechanical Systems SP - 100 EP - 110 PB - FSRM CY - Neuchatel ER -