TY  - JOUR
A1  - Prume, Klaus
A1  - Muralt, P.
A1  - Calame, F.
A1  - Schmitz-Kempen, T.
T1  - Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices  / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
JF  - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1
Y1  - 2007
SN  - 0885-3010
SP  - 81
EP  - 14
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Zalachas, Nicolas
A1  - Laskewitz, Bernd
A1  - Kamlah, Marc
T1  - Effective Piezoelectric Coefficients of Ferroelectric Thin Films on Elastic Substrates / Zalachas, Nicolas ; Laskewitz, Bernd ; Kamlah, Marc ; Prume, Klaus ; Lapusta, Yuri ; Tiedke, Stephan
JF  - Journal of Intelligent Material Systems and Structures. 20 (2008), H. 6
Y1  - 2008
SN  - 1045-389X
SP  - 683
EP  - 695
ER  -