TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Clemens, M.
A1  - Ehrfeld, W.
T1  - Micro gear pumps for dosing of viscous fluids. / Döpper, J. (u.a.)
JF  - Journal of Micromechanics and Microengineering. 7 (1997), H. 3
Y1  - 1997
SN  - 0960-1317
SP  - 230
EP  - 232
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Hessel, V.
A1  - Lacher, M.
T1  - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.
JF  - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1
Y1  - 1997
SN  - 0-7803-3664-X
SP  - 71
EP  - 79
PB  - IEEE Service Center
CY  - Piscataway, NJ
ER  -