TY  - CHAP
A1  - Poghossian, Arshak
A1  - Schumacher, Kerstin
A1  - Kloock, Joachim P.
A1  - Rosenkranz, Christian
A1  - Schultze, Joachim W.
A1  - Müller-Veggian, Mattea
A1  - Schöning, Michael Josef
T1  - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
N2  - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
KW  - Biosensor
KW  - Biosensorik
KW  - ISFET
KW  - Wafer
KW  - ISFET
KW  - wafer-level testing
KW  - capillary micro-droplet cell
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, Jürgen
A1  - Zander, Willy
A1  - Müller-Veggian, Mattea
T1  - Pulsed laser deposition as a novel preparation technique for chemical microsensors
JF  - Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)
Y1  - 1999
SP  - 124
EP  - 134
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
T1  - A novel silicon-based sensor array with capacitive EIS structures
JF  - Sensors and Actuators B. 47 (1998), H. 1-3
Y1  - 1998
SN  - 0925-4005
SP  - 225
EP  - 230
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, Anette
A1  - Ruge, Christian
A1  - Ecken, Holger
A1  - Müller-Veggian, Mattea
A1  - Lüth, Hans
T1  - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
JF  - Sensors. 2 (2002), H. 1
N2  - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Y1  - 2002
SN  - 1424-8220
U6  - https://doi.org/10.3390/s20100011
SP  - 11
EP  - 22
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Steffen, A.
A1  - Müller-Veggian, Mattea
T1  - Kapazitives Sensorarray in Siliziumtechnik für die Prozeßüberwachung
JF  - ITG-Fachbericht. 148 (1998)
Y1  - 1998
SN  - 0341-0196
SP  - 257
EP  - 263
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Gono, Y.
A1  - Haenni, D. R.
A1  - Beuscher, H.
T1  - Side bands in ¹⁷² Hf
JF  - Proceedings of the International Conference on Nuclear Structure : Tokyo, Sept. 5 - 10, 1977 / ed. by T. Marumori. - Journal of the Physical Society of Japan ; Vol. 44, 1978 : Suppl.
Y1  - 1978
N1  - International Conference on Nuclear Structure <1977, Tokyo>
SP  - 866
PB  - Physical Soc. of Japan
CY  - Tokyo
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Lieder, R. M.
A1  - Gono, Y.
T1  - High spin states in heavy transitional nuclei around Hg
JF  - International Symposium on High-Spin States and Nuclear Structure : held at Dresden from 19-24. Sept. 1977 ; contributed papers / ed.: L. Funke ...
Y1  - 1977
N1  - International Symposium on High Spin States and Nuclear Structure <1977, Dresden> ; (ZfK / Zentralinstitut fuer Kernforschung  ; 336)
SP  - 54
PB  - Zentralinst. fuer Kernforschung
CY  - Rossendorf
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Gono, Y.
T1  - High-spin states and isomers in light transitional nuclei around n=80
JF  - International Symposium on High-Spin States and Nuclear Structure : held at Dresden from 19-24. Sept. 1977 ; contributed papers / ed.: L. Funke ...
Y1  - 1977
N1  - International Symposium on High Spin States and Nuclear Structure <1977, Dresden> ; (ZfK / Zentralinstitut fuer Kernforschung  ; 336)
SP  - 19
PB  - Zentralinst. fuer Kernforschung
CY  - Rossendorf
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Gono, Y.
A1  - Lieder, R. M.
T1  - Side bands in ¹⁷² Hf
JF  - Frühjahrstagung ... des Fachausschusses Kernphysik und Hochenergiephysik der DPG (Sektion A: Kernphysik) / Deutsche Physikalische Gesellschaft (1977)
Y1  - 1977
SP  - 940
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Gono, Y.
A1  - Lieder, R. M.
T1  - Systematic features of isomeric states in Ce, Sm, Nd nuclei
JF  - Frühjahrstagung ... des Fachausschusses Kernphysik und Hochenergiephysik der DPG (Sektion A: Kernphysik) / Deutsche Physikalische Gesellschaft (1977)
Y1  - 1977
SP  - 892
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Gono, Y.
A1  - Lieder, R. M.
T1  - Particle and collective properties of high spin states in heavy nuclei near z=82
JF  - Frühjahrstagung ... des Fachausschusses Kernphysik und Hochenergiephysik der DPG (Sektion A: Kernphysik) / Deutsche Physikalische Gesellschaft (1977)
Y1  - 1977
SP  - 985
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Gono, Y.
T1  - Systematics of 10⁺ isomers in the N=78 nuclei
JF  - Annual report 1977 / Institut für Kernphysik Kernforschungsanlage Jülich
Y1  - 1978
N1  - Spezielle Berichte der Kernforschungsanlage Jülich ; 15
SP  - 33
EP  - 34
PB  - Verlag des Forschungszentrums Jülich
CY  - Jülich
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Haenni, D. R.
T1  - Evidence for a 10⁺ isomer in ¹³⁴ Ce
JF  - Annual report 1977 / Institut für Kernphysik Kernforschungsanlage Jülich
Y1  - 1978
N1  - Spezielle Berichte der Kernforschungsanlage Jülich ; 15
SP  - 30
EP  - 32
PB  - Verlag des Forschungszentrums Jülich
CY  - Jülich
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Lieder, R. M.
T1  - High-spin isomer in ¹³⁷ Ce
JF  - Annual report 1977 / Institut für Kernphysik Kernforschungsanlage Jülich
Y1  - 1978
N1  - Spezielle Berichte der Kernforschungsanlage Jülich ; 15
SP  - 32
EP  - 33
PB  - Verlag des Forschungszentrums Jülich
CY  - Jülich
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Neskakis, A.
A1  - Beuscher, H.
A1  - Haenni, D. R.
T1  - Band structure in ¹⁹⁴ Au
JF  - Annual report 1978 / Kernforschungsanlage Jülich Institut für Kernphysik / Hrsg.: A. Fässler. - (Spezielle Berichte der Kernforschungsanlage Jülich ; 36)
Y1  - 1979
SP  - 36
PB  - Kernforschungsanlage
CY  - Jülich
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Didelez, J. P.
A1  - Lieder, R. M.
A1  - Beuscher, H.
T1  - Study of the exitation functions of ²¹¹,²¹² Po
JF  - Annual report 1978 / Kernforschungsanlage Jülich Institut für Kernphysik / Hrsg.: A. Fässler. - (Spezielle Berichte der Kernforschungsanlage Jülich ; 36)
Y1  - 1979
SP  - 37
PB  - Kernforschungsanlage
CY  - Jülich
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Lieder, R. M.
A1  - Didelez, J. P.
A1  - Beuscher, H.
T1  - Observation of a New Isomer in ²¹² Po
JF  - Annual report 1978 / Kernforschungsanlage Jülich Institut für Kernphysik / Hrsg.: A. Fässler. -
Y1  - 1979
N1  - Spezielle Berichte der Kernforschungsanlage Jülich ; 36
SP  - 38
PB  - Kernforschungsanlage
CY  - Jülich
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Haenni, D. R.
A1  - Lieder, R. M.
T1  - Measurement of low-energy conversion eclectrons with the orange-ß-spectrometer
JF  - Annual report 1978 / Kernforschungsanlage Jülich Institut für Kernphysik / Hrsg.: A. Fässler. - (Spezielle Berichte der Kernforschungsanlage Jülich ; 36)
Y1  - 1979
SP  - 39
PB  - Kernforschungsanlage
CY  - Jülich
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Beuscher, H.
A1  - Haenni, D. R.
A1  - Bochev, B.
T1  - New isomers in ¹⁴² Sm
JF  - Structure of medium-heavy nuclei, 1979 : proceedings of the 6. European Physical Soc. Nuclear Divisional Conference on the Structure of Medium-Heavy Nuclei held in Rhodes, Greece, 1-4 May 1979 / ed. Committee: G. S. Anagnostatos ... - (Conference series / Institute of Physics London, Bristol ; 49)
Y1  - 1980
SN  - 0-85498-140-3
N1  - Conference on the Structure of Medium Heavy Nuclei <6, 1979, Rodos> ; European Physical Society / Nuclear Physics Division
SP  - 126
PB  - Inst. of Physics
CY  - Bristol
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Haenni, D. R.
A1  - Beuscher, H.
A1  - Lieder, R. M.
T1  - In-beam study of levels in ¹⁴⁵ Eu
JF  - Structure of medium-heavy nuclei, 1979 : proceedings of the 6. European Physical Soc. Nuclear Divisional Conference on the Structure of Medium-Heavy Nuclei held in Rhodes, Greece, 1-4 May 1979 / ed. Committee: G. S. Anagnostatos ... - (Conference series / Institute of Physics London, Bristol ; 49)
Y1  - 1980
SN  - 0-85498-140-3
N1  - Conference on the Structure of Medium Heavy Nuclei <6, 1979, Rodos> ; European Physical Society / Nuclear Physics Division
SP  - 131
PB  - Inst. of Physics
CY  - Bristol
ER  -