TY  - JOUR
A1  - Huck, Christina
A1  - Poghossian, Arshak
A1  - Bäcker, Matthias
A1  - Reisert, Steffen
A1  - Kramer, Friederike
A1  - Begoyan, Vardges K.
A1  - Buniatyan, Vahe V.
A1  - Schöning, Michael Josef
T1  - Multi-parameter sensing using high-k oxide of barium strontium titanate
JF  - Physica status solidi (a)
N2  - High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed.
Y1  - 2015
U6  - http://dx.doi.org/10.1002/pssa.201431911
SN  - 1862-6319
VL  - 212
IS  - 6
SP  - 1259
PB  - Wiley
CY  - Weinheim
ER  -