TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Kordos, P. A1 - Schultze, J.W. A1 - Lüth, H. T1 - Capacitive microsensors for biochemical sensing based on porous silicon technology JF - Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek Y1 - 2000 N1 - International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai) SP - 1184 EP - 1187 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Kurowski, A. A1 - Schultze, J.W. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon JF - Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.) Y1 - 2001 SN - 3-540-42150-5 N1 - Eurosensors (15, 2001, München) ; International Conference on Solid State Sensors and Actuators (11, 2001, München) SP - 640 EP - 643 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Lüth, H. T1 - Thin film chemical sensors based on chalcogenide glasses for „electronic tongue“ applications JF - Sensor 2001 : 10th international conference, May 8 - 10, 2001, Exhibition Centre Nuremberg, Germany ; proceedings Y1 - 2001 N1 - Sensor-Kongress ; (10, 2001, Nürnberg) Sensor 2001 Conference ; (10 : ; 2001.05.08-10 : ; Nuremberg) SP - 137 EP - 141 PB - AMA Service CY - Wunstorf ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Y. G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors? JF - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...] Y1 - 2000 SN - 87-89935-50-0 N1 - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen) SP - 615 EP - 618 PB - MIC, Mikroelektronik Centret CY - Lyngby, Denmark ER - TY - JOUR A1 - Mourzina, Yu.G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Thin film microsensors for fast heavy metal analysis JF - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...] Y1 - 2000 SN - 87-89935-50-0 N1 - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen) SP - 839 EP - 840 PB - MIC, Mikroelektronik Centret CY - Lyngby, Denmark ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Crott, M. A1 - Ronkel, F. A1 - Thust, M. A1 - Schultze, J. W. A1 - Kordos, P. A1 - Lüth, H. T1 - A capacitive chemical sensor based on porous silicon JF - Proceedings of the 26th European Solid State Device Research Conference : Congress Centre, Bologna, Italy, 9 - 11 September 1996 / ESSDERC '96. Ed. by G. Baccarani Y1 - 1996 SN - 2-86332-196-X N1 - ESSDERC ; (26, 1996, Bologna) ; European Solid State Device Research Conference (ESSDERC) SP - 907 EP - 910 PB - Ed. Frontières CY - Gif-sur-Yvette ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Beckers, L. A1 - Schaub, A. A1 - Zander, W. A1 - Schubert, J. A1 - Mesters, S. A1 - Kordos, P. A1 - Lüth, H. T1 - A novel silicon-based pH sensor prepared by pulsed laser deposition technique JF - Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium / [KU Leuven]. Puers, Robert. Vol. 3. Y1 - 1996 SN - 90-803282-1-9 N1 - Eurosensors ; (10, 1996, Louvain) Eurosensors, the European Conference on Solid-State Transducers ; (10 : ; 1996.09.08-11 : ; Leuven) SP - 781 EP - 784 PB - Catholic University Leuven CY - Heverlee, Belgium ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schaub, A. A1 - Zundel, A. A1 - Beckers, L. A1 - Schubert, J. A1 - Zander, W. A1 - Kordos, P. A1 - Lüth, H. T1 - Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors JF - Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff Y1 - 1995 SN - 2-86332-182-X N1 - ESSDERC ; (25, 1995, 's-Gravenhage) ; European Solid State Device Research Conference (ESSDERC) ; (25 : ; 1995.09.25-27 : ; Den Haag) SP - 601 EP - 604 PB - Ed. Frontières CY - Gif-sur-Yvette ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Faßbender, F. A1 - Glück, O. A1 - Schmitt, G. A1 - Schultze, J. W. A1 - Lüth, H. T1 - A silicon-based microelectrode array for chemical analysis JF - Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou Y1 - 1998 N1 - International Meeting on Chemical Sensors ; (7, 1998, Beijing) ; International Meeting on Chemical Sensors (IMCS) ; (7 : ; 1998.07.27-30 : ; Beijing) SP - 100 EP - 102 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Yoshinobu, T. A1 - Schubert, J. A1 - Steffen, A. A1 - Lüth, H. T1 - Innovative Schichttechniken und Messprinzipien für kapazitive Feldeffektsensoren JF - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl .... Y1 - 2002 SN - 3-8007-2675-0 N1 - Sensoren und Mess-Systeme 2002 SP - 151 EP - 154 PB - VDE-Verl. CY - Berlin [u.a.] ER -