TY  - JOUR
A1  - Vlasov, Y. G.
A1  - Mourzina, Y. G.
A1  - Legin, A. V.
A1  - Ermelenko, Y. E.
A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition
JF  - Russian Journal of Applied Chemistry. 75 (2002), H. 3
Y1  - 2002
SN  - 1070-4272
SP  - 351
EP  - 356
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - Miniaturisierte Referenzelektroden in Siliziumtechnologie für elektrochemische Sensoranwendungen
JF  - Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. März 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik
Y1  - 2004
SN  - 3-18-091829-2
N1  - Auch erschienen als: VDI-Berichte ; 1829
SP  - 847
EP  - 850
PB  - VDI
CY  - Düsseldorf
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - New concepts of miniaturised reference electrodes in silicon technology for potentiometric sensor systems
JF  - Sensors and Actuators B. 103 (2004), H. 1-2
Y1  - 2004
SN  - 0925-4005
SP  - 429
EP  - 435
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - Strategies of miniaturised reference electrodes integrated in a silicon-based „one chip“ pH sensor
JF  - Sensors. 3 (2003), H. 9
Y1  - 2003
SN  - 1424-8220
SP  - 330
EP  - 339
ER  - 
TY  - JOUR
A1  - Simonis, A.
A1  - Krings, T.
A1  - Lüth, H.
A1  - Wang, J.
A1  - Schöning, Michael Josef
T1  - A „hybrid“ thin-film pH sensor with integrated thick-film reference
JF  - Sensors. 1 (2001), H. 6
Y1  - 2001
SN  - 1424-8220
SP  - 183
EP  - 192
ER  - 
TY  - JOUR
A1  - Schütz, S.
A1  - Czynski, J.
A1  - Hummel, Hans E.
A1  - Schöning, Michael Josef
A1  - Schroth, P.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Insect meets microelectronics: A BioFET as a first step to bioelectronic microsystems
JF  - Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek
Y1  - 2000
N1  - International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai)
SP  - 1104
EP  - 1107
PB  - Elsevier
CY  - Amsterdam [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Yoshinobu, T.
A1  - Schubert, J.
A1  - Steffen, A.
A1  - Lüth, H.
T1  - Innovative Schichttechniken und Messprinzipien für kapazitive Feldeffektsensoren
JF  - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl ....
Y1  - 2002
SN  - 3-8007-2675-0
N1  - Sensoren und Mess-Systeme 2002
SP  - 151
EP  - 154
PB  - VDE-Verl.
CY  - Berlin [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Kordos, P.
A1  - Schultze, J.W.
A1  - Lüth, H.
T1  - Capacitive microsensors for biochemical sensing based on porous silicon technology
JF  - Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek
Y1  - 2000
N1  - International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai)
SP  - 1184
EP  - 1187
PB  - Elsevier
CY  - Amsterdam [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Ronkel, F.
A1  - Schultze, J. W.
T1  - Halbleiter-Schichtstrukturen mit porösem Silizium als Chemo- und Biosensoren
JF  - ITG-Fachbericht. 148 (1998)
Y1  - 1998
SN  - 0341-0196
SP  - 33
EP  - 40
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, A.
A1  - Krings, T.
A1  - Lüth, H.
A1  - Wang, J.
T1  - Evaluation of a chip-based thin-film / thick-film sensor hybrid for (bio-)chemical analysis
JF  - Electroanalysis
Y1  - 2002
SN  - 1040-0397
VL  - 14
IS  - 13
SP  - 955
EP  - 958
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, J
A1  - Kloock, Joachim P.
A1  - Zander, W.
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Innovative thin film techniques for microfabricating electrochemical sensors
JF  - Lecture Notes of the ICB Seminars
Y1  - 2002
SP  - 55
EP  - 66
PB  - MCB
CY  - Warsaw
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Mesters, S.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique
JF  - Sensors and Actuators B. 68 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 254
EP  - 259
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique
JF  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.
Y1  - 1999
SN  - 90-76699-02-X
N1  - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague)
SP  - 847
EP  - 850
CY  - The Hague, The Netherlands
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schaub, A.
A1  - Zundel, A.
A1  - Beckers, L.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors
JF  - Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff
Y1  - 1995
SN  - 2-86332-182-X
N1  - ESSDERC ; (25, 1995, 's-Gravenhage) ; European Solid State Device Research Conference (ESSDERC) ; (25 : ; 1995.09.25-27 : ; Den Haag)
SP  - 601
EP  - 604
PB  - Ed. Frontières
CY  - Gif-sur-Yvette
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Poghossian, Arshak
A1  - Schultze, J. W.
A1  - Lüth, H.
T1  - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters
JF  - Proceedings of SPIE. 4576 (2002)
Y1  - 2002
SP  - 149
EP  - 159
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Mourzina, Yu.G.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Pulsed laser deposition – an innovative technique for preparing inorganic thin films
JF  - Electroanalysis. 13 (2001), H. 8-9
Y1  - 2001
SN  - 1040-0397
SP  - 727
EP  - 732
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Mourzina, Y. G.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?
JF  - Sensors and Actuators B. 78 (2001), H. 1-3
Y1  - 2001
SN  - 0925-4005
N1  - Selected Papers form Eurosensors XIV
SP  - 273
EP  - 278
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Mourzina, Y. G.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors?
JF  - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]
Y1  - 2000
SN  - 87-89935-50-0
N1  - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen)
SP  - 615
EP  - 618
PB  - MIC, Mikroelektronik Centret
CY  - Lyngby, Denmark
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Kurowski, A.
A1  - Thust, M.
A1  - Kordos, P.
A1  - Schultze, J. W.
A1  - Lüth, H.
T1  - Capacitive microsensors for biochemical sensing on porous silicon technology
JF  - Sensors and Actuators B. 64 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 59
EP  - 64
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Crott, M.
A1  - Ronkel, F.
A1  - Thust, M.
A1  - Schultze, J. W.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Investigations on porous silicon layers with regard to chemical microsensor applications
JF  - Third International Conference on Intelligent Materials : Lyon, 3-4-5 June 1996, Center of Congress "L'Espace Tête d'Or" / [publ. by SPIE, the International Society for Optical Engineering]. General chair/ed. by: P. F. Gobin
Y1  - 1996
SN  - 0819421650
N1  - International Conference on Intelligent Materials ; (3, 1996, Lyon)
SP  - 275
EP  - 280
PB  - SPIE
CY  - Bellingham, Wash.
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Crott, M.
A1  - Ronkel, F.
A1  - Thust, M.
A1  - Schultze, J. W.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - A capacitive chemical sensor based on porous silicon
JF  - Proceedings of the 26th European Solid State Device Research Conference : Congress Centre, Bologna, Italy, 9 - 11 September 1996 / ESSDERC '96. Ed. by G. Baccarani
Y1  - 1996
SN  - 2-86332-196-X
N1  - ESSDERC ; (26, 1996, Bologna) ; European Solid State Device Research Conference (ESSDERC)
SP  - 907
EP  - 910
PB  - Ed. Frontières
CY  - Gif-sur-Yvette
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Buß, G.
A1  - Lüth, H.
A1  - Schultze, J.W.
T1  - Modifications and characterization of a silicon-based microelectrode array
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3899
EP  - 3910
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Buß, G.
A1  - Faßbender, F.
A1  - Glück, O.
A1  - Schmitt, G.
A1  - Schultze, J. W.
A1  - Lüth, H.
T1  - A silicon-based microelectrode array for chemical analysis
JF  - Sensors and Actuators B. 65 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 284
EP  - 287
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Buß, G.
A1  - Faßbender, F.
A1  - Glück, O.
A1  - Schmitt, G.
A1  - Schultze, J. W.
A1  - Lüth, H.
T1  - A silicon-based microelectrode array for chemical analysis
JF  - Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou
Y1  - 1998
N1  - International Meeting on Chemical Sensors ; (7, 1998, Beijing) ; International Meeting on Chemical Sensors (IMCS) ; (7 : ; 1998.07.27-30 : ; Beijing)
SP  - 100
EP  - 102
PB  - Elsevier
CY  - Amsterdam [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Beckers, L.
A1  - Schaub, A.
A1  - Zander, W.
A1  - Schubert, J.
A1  - Mesters, S.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - A novel silicon-based pH sensor prepared by pulsed laser deposition technique
JF  - Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium / [KU Leuven]. Puers, Robert.  Vol. 3.
Y1  - 1996
SN  - 90-803282-1-9
N1  - Eurosensors ; (10, 1996, Louvain) Eurosensors, the European Conference on Solid-State Transducers ; (10 : ; 1996.09.08-11 : ; Leuven)
SP  - 781
EP  - 784
PB  - Catholic University Leuven
CY  - Heverlee, Belgium
ER  - 
TY  - JOUR
A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Schmidt, C.
A1  - Siegert, M.
A1  - Mesters, S.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Legin, A.
A1  - Mourzina, Y. G.
A1  - Seleznev, B.
A1  - Vlasov, Y. G.
T1  - Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique
JF  - Applied Physics A. 69, (1999), H. Supplement 1
Y1  - 1999
SN  - 0947-8396
U6  - http://dx.doi.org/10.1007/s003390051534
SP  - 803
EP  - 805
ER  - 
TY  - JOUR
A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Mourzina, Y. G.
A1  - Legin, A. V.
A1  - Vlasov, Y. G.
A1  - Zander, W.
A1  - Lüth, H.
T1  - Multicomponent thin films for electrochemical sensor applications prepared by pulsed laser deposition
JF  - Sensors and Actuators B. 76 (2001), H. 1-3
Y1  - 2001
SN  - 0925-4005
SP  - 327
EP  - 330
ER  - 
TY  - JOUR
A1  - Schmitt, G.
A1  - Schultze, J.-W.
A1  - Faßbender, F.
A1  - Buß, G.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Passivation and corrosion of microelectrode arrays
JF  - Electrochimica Acta. 44 (1999), H. 21-22
Y1  - 1999
SN  - 0013-4686
SP  - 3865
EP  - 3883
ER  - 
TY  - JOUR
A1  - Schmitt, G.
A1  - Faßbender, F.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
A1  - Schultze, J. W.
A1  - Buß, G.
T1  - Passivation and corrosion of microelectrode arrays
JF  - Materials and Corrosion. 51 (2000), H. 1
Y1  - 2000
SN  - 0947-5117
SP  - 20
EP  - 25
ER  - 
TY  - JOUR
A1  - Poghossian, Arshak
A1  - Lüth, H.
A1  - Schultze, J. W.
A1  - Schöning, Michael Josef
T1  - (Bio-)chemical and physical microsensor array using an identical transducer principle
JF  - Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz
Y1  - 2001
SN  - 0-08-044014-2
SP  - 243
EP  - 249
PB  - Elsevier [u.a.]
CY  - Amsterdam [u.a.]
ER  - 
TY  - JOUR
A1  - Poghossian, Arshak
A1  - Berndsen, L.
A1  - Schultze, J. W.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - „High order“ hybrid sensor module based on an identical transducer principle
JF  - Chemical and biological sensors and analytical methods : proceedings of the international symposium / Sensor, Physical Electrochemistry, and Organic and Biological Electrochemistry Divisions. Ed.: M. Butler
Y1  - 2001
SN  - 1-56677-351-2
N1  - International Symposium: Chemical and Biological Sensors and Analytical Methods ; (2 : 2001.)
SP  - 143
EP  - 152
PB  - Electrochemical Society
CY  - Pennington, NJ
ER  - 
TY  - JOUR
A1  - Poghossian, Arshak
A1  - Berndsen, L.
A1  - Lüth, H.
A1  - Schultze, J. W.
A1  - Schöning, Michael Josef
T1  - Multi-Parameter-Detektions-System unter dem Einsatz eines einzigen Transducerprinzips sowohl für (bio-)chemische als auch physikalische Sensoren
JF  - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl ....
Y1  - 2002
SN  - 3-8007-2675-0
N1  - Sensoren und Mess-Systeme 2002
SP  - 137
EP  - 140
PB  - VDE-Verl.
CY  - Berlin [u.a.]
ER  - 
TY  - JOUR
A1  - Mourzina, Yu.G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Thin film microsensors for fast heavy metal analysis
JF  - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...]
Y1  - 2000
SN  - 87-89935-50-0
N1  - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen)
SP  - 839
EP  - 840
PB  - MIC, Mikroelektronik Centret
CY  - Lyngby, Denmark
ER  - 
TY  - JOUR
A1  - Mourzina, Yu. G.
A1  - Schubert, J
A1  - Zander, W.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Development of multisensor systems based on chalcogenide thin film chemical sensors for the simultaneous multicomponent analysis of metal ions in complex solutions
JF  - Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz
Y1  - 2001
SN  - 0-08-044014-2
SP  - 251
EP  - 263
PB  - Elsevier [u.a.]
CY  - Amsterdam [u.a.]
ER  - 
TY  - JOUR
A1  - Mourzina, Y.G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A. V.
A1  - Vlasov, Y. G.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - A new thin film Pb microsensor based on chalcogenide glasses
JF  - Sensors and Actuators B. 71 (2000), H. 1-2
Y1  - 2000
SN  - 0925-4005
SP  - 13
EP  - 18
ER  - 
TY  - JOUR
A1  - Mourzina, Y. G.
A1  - Yoshinobu, T.
A1  - Schubert, J.
A1  - Lüth, H.
A1  - Iwasaki, H.
A1  - Schöning, Michael Josef
T1  - Ion-selective lightaddressable potentiometric sensor (LAPS) with chalcogenide thin film by pulsed laser deposition
JF  - Sensors and Actuators B. 80 (2001), H. 2
Y1  - 2001
SN  - 0925-4005
SP  - 136
EP  - 140
ER  - 
TY  - JOUR
A1  - Mourzina, Y. G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Legin, A. V.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Copper, cadmium and thallium thin film sensors based on chalcogenide glasses
JF  - Analytica Chimica Acta. 433 (2001)
Y1  - 2001
SN  - 0378-4304
SP  - 103
EP  - 110
ER  - 
TY  - JOUR
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Schöning, Michael Josef
A1  - Schubert, J.
A1  - Zander, W.
A1  - Lüth, H.
T1  - Thin film chemical sensors based on chalcogenide glasses for „electronic tongue“ applications
JF  - Sensor 2001 : 10th international conference, May 8 - 10, 2001, Exhibition Centre Nuremberg, Germany ; proceedings
Y1  - 2001
N1  - Sensor-Kongress ; (10, 2001, Nürnberg) Sensor 2001 Conference ; (10 : ; 2001.05.08-10 : ; Nuremberg)
SP  - 137
EP  - 141
PB  - AMA Service
CY  - Wunstorf
ER  - 
TY  - JOUR
A1  - Kurowski, A.
A1  - Schultze, J.W.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Micro- and nanopatterning of sensor chips by means of macroporous silicon
JF  - Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.)
Y1  - 2001
SN  - 3-540-42150-5
N1  - Eurosensors (15, 2001, München) ; International Conference on Solid State Sensors and Actuators (11, 2001, München)
SP  - 640
EP  - 643
PB  - Springer
CY  - Berlin [u.a.]
ER  - 
TY  - JOUR
A1  - Kurowski, A.
A1  - Schultze, J.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Micro- and nanopatterning of sensor chips by means of macroporous silicon.
JF  - Sensors and Actuators B. 83 (2002), H. 1-3
Y1  - 2002
SN  - 0925-4005
N1  - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV
SP  - 123
EP  - 128
ER  - 
TY  - JOUR
A1  - Faßbender, F.
A1  - Schmitt, G.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Buß, G.
A1  - Schultze, J. W.
T1  - Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays
JF  - Sensors and Actuators B. 68 (2000), H. 1-3
Y1  - 2000
SN  - 0925-4005
SP  - 128
EP  - 133
ER  - 
TY  - JOUR
A1  - Faßbender, F.
A1  - Schmitt, G.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Buß, G.
A1  - Schultze, J. W.
T1  - Passivation and corrosion of microsensor devices exemplified at microelectrode arrays
JF  - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1.
Y1  - 1999
SN  - 90-76699-02-X
N1  - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague)
SP  - 953
EP  - 956
CY  - The Hague, The Netherlands
ER  - 
TY  - JOUR
A1  - Buß, G.
A1  - Ecken, H.
A1  - Winkels, S.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
A1  - Schultze, J. W.
T1  - Galvanic modifications of multifunctional silicon-based microelectrode arrays
JF  - Electrochemical technology applications in electronics : proceedings of the third international symposium / [International Symposium on Electrochemical Technology Applications in Electronics, held during October 20 - 22, 1999, Honolulu, Hawaii]. Electrodeposition Division. Ed.: L. T. Romankiw
Y1  - 2000
SN  - 1566772575
N1  - International Symposium on Electrochemical Technology Applications in Electronics ; (3, 1999, Honolulu, Hawaii) ; Proceedings volume // Electrochemical Society ; 99-34
SP  - 209
EP  - 215
PB  - Electrochemical Society
CY  - Pennington, NJ
ER  -