TY - JOUR A1 - Kurowski, A. A1 - Schultze, J.W. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon JF - Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.) Y1 - 2001 SN - 3-540-42150-5 N1 - Eurosensors (15, 2001, München) ; International Conference on Solid State Sensors and Actuators (11, 2001, München) SP - 640 EP - 643 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Hoffmann, W. A1 - Bruns, M. A1 - Ache, H.J. (u.a.) T1 - Chemical microsensors and evaporated silver halide layers JF - Bulgarian Chemical Communications. 26 (1993), H. 3-4 Y1 - 1993 SN - 0324-1130 SP - 402 EP - 410 ER -