TY - JOUR A1 - Kurowski, A. A1 - Schultze, J. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon. JF - Sensors and Actuators B. 83 (2002), H. 1-3 Y1 - 2002 SN - 0925-4005 N1 - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV SP - 123 EP - 128 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Lüth, H. T1 - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters JF - Proceedings of SPIE. 4576 (2002) Y1 - 2002 SP - 149 EP - 159 ER - TY - JOUR A1 - Faßbender, F. A1 - Schmitt, G. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Buß, G. A1 - Schultze, J. W. T1 - Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 128 EP - 133 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Faßbender, F. A1 - Glück, O. A1 - Schmitt, G. A1 - Schultze, J. W. A1 - Lüth, H. T1 - A silicon-based microelectrode array for chemical analysis JF - Sensors and Actuators B. 65 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 284 EP - 287 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Kurowski, A. A1 - Thust, M. A1 - Kordos, P. A1 - Schultze, J. W. A1 - Lüth, H. T1 - Capacitive microsensors for biochemical sensing on porous silicon technology JF - Sensors and Actuators B. 64 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 59 EP - 64 ER - TY - JOUR A1 - Schmitt, G. A1 - Faßbender, F. A1 - Lüth, H. A1 - Schöning, Michael Josef A1 - Schultze, J. W. A1 - Buß, G. T1 - Passivation and corrosion of microelectrode arrays JF - Materials and Corrosion. 51 (2000), H. 1 Y1 - 2000 SN - 0947-5117 SP - 20 EP - 25 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Application of a (bio-)chemical sensor (ISFET) for the detection of physical parameters in liquids JF - Electrochimica Acta. 48 (2003), H. 20-22 Y1 - 2003 SP - 3289 EP - 3297 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Multi-parameter detection of (bio-)chemical and physical quantities using an identical transducer principle JF - Sensors and Actuators B. 91 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 83 EP - 91 ER - TY - JOUR A1 - Faßbender, F. A1 - Schmitt, G. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Buß, G. A1 - Schultze, J. W. T1 - Passivation and corrosion of microsensor devices exemplified at microelectrode arrays JF - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1. Y1 - 1999 SN - 90-76699-02-X N1 - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague) SP - 953 EP - 956 CY - The Hague, The Netherlands ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Crott, M. A1 - Ronkel, F. A1 - Thust, M. A1 - Schultze, J. W. A1 - Kordos, P. A1 - Lüth, H. T1 - A capacitive chemical sensor based on porous silicon JF - Proceedings of the 26th European Solid State Device Research Conference : Congress Centre, Bologna, Italy, 9 - 11 September 1996 / ESSDERC '96. Ed. by G. Baccarani Y1 - 1996 SN - 2-86332-196-X N1 - ESSDERC ; (26, 1996, Bologna) ; European Solid State Device Research Conference (ESSDERC) SP - 907 EP - 910 PB - Ed. Frontières CY - Gif-sur-Yvette ER -