TY - GEN A1 - Kämper, Klaus-Peter T1 - Lecture notes Sensors and Actuators WS 2008/2009 N2 - Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter Kämper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index N2 - Kennwortgeschützter Zugang nur für Studierende bei Prof. Dr. Klaus-Peter Kämper. Wintersemester 2008/2009. 488 Seiten (pdf-Format) KW - Sensor KW - Aktor KW - Sensoren KW - Aktoren KW - Sensores KW - Actuators KW - Microfabrication Y1 - 2008 ER - TY - JOUR A1 - Kämper, Klaus-Peter T1 - Development of low-cost injection moulded micropumps. Entwicklung von kostengünstigen, mittels Spritzguß hergestellten Mikropumpen / Döpper, J. (u.a.) JF - Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH Y1 - 1996 N1 - Konferenz-Einzelbericht: ACTUATOR, Internat. Conf. on New Actuators, 5 SP - 37 EP - 40 CY - Bremen ER - TY - JOUR A1 - Kämper, Klaus-Peter T1 - Education and Training in MST. Kämper, K.-P.; Picard, A.; Brill, M.; Cassel, D.; Jentsch, A.; Merten, S.; Rollwa, M. JF - Mst-News (2003) Y1 - 2003 SN - 0948-3128 SP - 35 ER - TY - GEN A1 - Kämper, Klaus-Peter T1 - Lecture notes Sensors and Actuators N2 - Kennwortgeschützter Zugang nur für Studierende bei Prof. Dr. Klaus-Peter Kämper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format) N2 - Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter Kämper. Winter semester 2007/2008. Version 2007-08-30. 472 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids KW - Sensor KW - Aktor KW - Sensoren KW - Aktoren KW - Sensores KW - Actuators KW - Microfabrication Y1 - 2007 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Abraham, D. L. A1 - Hopster, H. T1 - Spin-polarized electron-energy-loss spectroscopy on epitaxial fcc Co layers on Cu(001) JF - Physical Review B. 45 (1992), H. 24 Y1 - 1992 SN - 1095-3795 SP - 14335 EP - 14346 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Abraham, M. A1 - Ehrfeld, W. A1 - Hessel, V. T1 - Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A. JF - Microelectronic Engineering. 41-42 (1998) Y1 - 1998 SN - 0167-9317 N1 - International Conference on Micro- and Nanofarbication SP - 47 EP - 52 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Berg, U. A1 - Begemann, M. A1 - Hagemann, B. (u.a.) T1 - Series production and testing of a micro motor. Serienfertigung und Prüfung eines Mikromotors JF - Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ... Y1 - 1998 SN - 3-933339-00-6 N1 - Konferenz-Einzelbericht: ACTUATOR, Internat. Conf. on New Actuators SP - 552 EP - 555 PB - Messe Bremen CY - Bremen ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Clemens, M. A1 - Ehrfeld, W. T1 - Micro gear pumps for dosing of viscous fluids. / Döpper, J. (u.a.) JF - Journal of Micromechanics and Microengineering. 7 (1997), H. 3 Y1 - 1997 SN - 0960-1317 SP - 230 EP - 232 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H. JF - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey Y1 - 1995 SN - 1-85312-390-0 SP - 3 EP - 10 PB - Computational Mechanics Publ. CY - Southampton [u.a.] ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - An investigation of computer modelling for micro-injection moulding. Hill, S.D.J.; Kämper, K.-P.; Dasbach, U.; Döpper, J.; Ehrfeld, W.; Kaupert, M. JF - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey Y1 - 1995 SN - 1-85312-390-0 SP - 275 PB - Computational Mechanics Publ. CY - Southampton [u.a.] ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Ehrfeld, W. A1 - Oberbeck, S. T1 - A self-filling low-cost membrane micropump JF - Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division Y1 - 1998 SN - 078034412X N1 - International Workshop on Micro-Electro-Mechanical Systems <11, 1998, Heidelberg> SP - 432 EP - 437 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Döpper, J. A1 - Hessel, V. T1 - Microfluidic components for biological and chemical microreactors. Kämper, K.-P.; Ehrfeld, W.; Döpper, J.; Hessel, V.; Lehr, H.; Löwe, H.; Richter, T.; Wolf, A. JF - Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ... Y1 - 1997 SN - 0-7803-3744-1 N1 - International Workshop on Micro-Electro-Mechanical Systems <10, 1997, Nagoya> SP - 338 EP - 343 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Hagemann, B. A1 - Lehr, H. T1 - Electromagnetic permanent magnet micromotor with integrated micro gear box. Kämper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Thürigen, C.; Wittig, T. JF - Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH Y1 - 1996 N1 - International Conference on New Actuators <5, 1996, Bremen> SP - 429 CY - Bremen ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Hessel, V. A1 - Lacher, M. T1 - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C. JF - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1 Y1 - 1997 SN - 0-7803-3664-X SP - 71 EP - 79 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Hagemann, B. A1 - Lehr, H. A1 - Michel, F. T1 - LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C. JF - LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed. Y1 - 1995 N1 - University Enterprise Training Partnership for Micro-Electro-Mechanical Systems SP - 100 EP - 110 PB - FSRM CY - Neuchatel ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Kurzawa, R. A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Spin-resolved photoemission study of in situ grown epitaxial Fe layers on W(110). Kurzawa, R.; Kämper, K.-P.; Schmitt, W.; Güntherodt, G. JF - Solid State Communications. 60 (1986), H. 10 Y1 - 1986 SN - 0038-1098 SP - 777 EP - 780 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Abel, S. A1 - Döpper, J. T1 - Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C. JF - Proceedings of the SPIE - The International Society for Optical Engineering Y1 - 1996 SN - 0277-786X N1 - Konferenz-Einzelbericht. SP - 202 EP - 210 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Abel, S. A1 - Ehrfeld, W. T1 - Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Thürigen, C. JF - Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994) Y1 - 1995 N1 - 2nd Japan-France Congress on mechatronics (1994 Nov : Takamatsu, Japan) SP - 31 EP - 31 PB - Fuji Technology Press ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - Development of micro and millimotors. Lehr, H.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulz, C.; Thürigen C. JF - Minimally Invasive Therapy and Allied Technologies. 6 (1997) Y1 - 1997 SN - 1364-5706 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Ehrfeld, W. A1 - Michel, F. T1 - LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M. JF - 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN Y1 - 1994 SN - 0780321146 SP - 43 EP - 47 CY - Piscataway, N.J. ER -