TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Ehrfeld, W.
A1  - Oberbeck, S.
T1  - A self-filling low-cost membrane micropump
JF  - Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
Y1  - 1998
SN  - 078034412X
N1  - International Workshop on Micro-Electro-Mechanical Systems <11, 1998, Heidelberg>
SP  - 432
EP  - 437
PB  - IEEE Service Center
CY  - Piscataway, NJ
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Abraham, M.
A1  - Ehrfeld, W.
A1  - Hessel, V.
T1  - Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.
JF  - Microelectronic Engineering. 41-42 (1998)
Y1  - 1998
SN  - 0167-9317
N1  - International Conference on Micro- and Nanofarbication <Athens, Greece, 15 September - 18 September 1998>
SP  - 47
EP  - 52
ER  -