TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Ehrfeld, W.
A1  - Hagemann, B.
T1  - Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.
JF  - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey
Y1  - 1995
SN  - 1-85312-390-0
SP  - 3
EP  - 10
PB  - Computational Mechanics Publ.
CY  - Southampton [u.a.]
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lacher, M.
A1  - Abraham, M.
A1  - Ehrfeld, W.
T1  - Mikrosysteme für die Luft- und Raumfahrt. Lacher, M.; Abraham, M.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Lehr, H.; Picard, A.; Zetterer, T.
JF  - Deutscher Luft- und Raumfahrtkongreß 1995/1 (1995). Bonn, 26. - 29. September 1995 Motto: "Luft- und Raumfahrt - Schlüsseltechnologien für das 21. Jahrhundert"
Y1  - 1995
N1  - DGLR-Jahrestagung ; 1995
SP  - 415
EP  - 423
PB  - Deutsche Gesellschaft für Luft- und Raumfahrt
CY  - Lilienthal-Oberth
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Abraham, M.
A1  - Ehrfeld, W.
A1  - Hessel, V.
T1  - Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.
JF  - Microelectronic Engineering. 41-42 (1998)
Y1  - 1998
SN  - 0167-9317
N1  - International Conference on Micro- and Nanofarbication <Athens, Greece, 15 September - 18 September 1998>
SP  - 47
EP  - 52
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Döpper, J.
A1  - Hessel, V.
T1  - Microfluidic components for biological and chemical microreactors. Kämper, K.-P.; Ehrfeld, W.; Döpper, J.; Hessel, V.; Lehr, H.; Löwe, H.; Richter, T.; Wolf, A.
JF  - Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...
Y1  - 1997
SN  - 0-7803-3744-1
N1  - International Workshop on Micro-Electro-Mechanical Systems <10, 1997, Nagoya>
SP  - 338
EP  - 343
PB  - IEEE Service Center
CY  - Piscataway, NJ
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Clemens, M.
A1  - Ehrfeld, W.
T1  - Micro gear pumps for dosing of viscous fluids. / Döpper, J. (u.a.)
JF  - Journal of Micromechanics and Microengineering. 7 (1997), H. 3
Y1  - 1997
SN  - 0960-1317
SP  - 230
EP  - 232
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Hessel, V.
A1  - Lacher, M.
T1  - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.
JF  - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1
Y1  - 1997
SN  - 0-7803-3664-X
SP  - 71
EP  - 79
PB  - IEEE Service Center
CY  - Piscataway, NJ
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Lehr, H.
A1  - Michel, F.
T1  - LIGA-Technik zur Fertigung von Mikroaktoren. Ehrfeld. W.; Kämper, K.-P.; Lehr, H.; Michel, F.
JF  - Mikroelektronik . 7 (1993), H. 5
Y1  - 1993
SN  - 0931-2714
SP  - LXIX
EP  - LXXI
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schulz, C.
A1  - Ehrfeld, W.
A1  - Erbel, R.
T1  - LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T.
JF  - 3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]
Y1  - 1994
N1  - Microengineering in Medicine and Biology Training Course 1994, Lausanne
PB  - REPRO EPFL
CY  - Lausanne
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Ehrfeld, W.
A1  - Michel, F.
T1  - LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M.
JF  - 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN
Y1  - 1994
SN  - 0780321146
SP  - 43
EP  - 47
CY  - Piscataway, N.J.
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Thürigen, C.
A1  - Ehrfeld, W.
A1  - Hagemann, B.
T1  - Gesichtspunkte beim Miniaturisieren von Umlaufrädergetrieben. Thürigen, C.; Ehrfeld, W. ; Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.
JF  - Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM
Y1  - 1996
SN  - 3-18-091269-3
N1  - VDI-Berichte ; 1269
SP  - 235
PB  - VDI-Verl.
CY  - Düsseldorf
ER  -