TY - CHAP A1 - Merten, Sabine A1 - Kämper, Klaus-Peter A1 - Brill, Manfred A1 - Picard, Antoni A1 - Cassel, Detlev A1 - Jentsch, Andreas A1 - Rollwa, Markus T1 - Virtuelle Sensor-Fertigung: Hightech mit LabVIEW N2 - Eine neue Generation von Praktika an Hochschulen wächst heran. Moderne Wege beim Verstehen und Erlernen naturwissenschaftlicher Zusammenhänge sowie industrieller Fertigungsprozesse sind gefordert. Das Technologiepraktikum „Virtuelle Sensor- Fertigung“, entwickelt im Verbundprojekt INGMEDIA an den Fachhochschulen Aachen und Zweibrücken, trägt als neuartiges Lern- und Lehrmodul dieser Forderung Rechnung. Die Studierenden lernen einen vollständigen Fertigungsprozess mit Hilfe von virtuellen, in LabVIEW programmierten Maschinen kennen, bevor sie die reale Prozesskette im Reinraum durchführen. N2 - A new generation of university laboratory courses is presently being developed. Modern concepts for the understanding and learning of applied science and industrial fabrication processes are required. The technology course “Fabrication of a microsensor”, developed by the Universities of Applied Sciences Aachen and Zweibrücken in the joint research project INGMEDIA, represents a new approach towards education in high technology production. The students learn the operation of the complex microfabrication line with the help of virtual fabrication machines, programmed in LabVIEW, before they perform the actual process in a genuine clean room. KW - LabVIEW KW - Virtuelle Sensor-Fertigung KW - Fertigungsprozess KW - virtuelle Maschinen KW - virtual sensor fabrication KW - manufacturing process KW - virtual KW - virtual machines Y1 - 2003 ER - TY - CHAP A1 - Merten, Sabine A1 - Conrad, Thorsten A1 - Kämper, Klaus-Peter A1 - Picard, Antoni A1 - Schütze, Andreas T1 - Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries N2 - Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years. KW - Virtuelles Laboratorium KW - Virtuelles Labor KW - Hand-on-training KW - Virtual Technology Lab KW - MEMS ; education and training foundry Y1 - 2006 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Thürigen, C. A1 - Ehrfeld, W. A1 - Hagemann, B. T1 - Gesichtspunkte beim Miniaturisieren von Umlaufrädergetrieben. Thürigen, C.; Ehrfeld, W. ; Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F. JF - Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM Y1 - 1996 SN - 3-18-091269-3 N1 - VDI-Berichte ; 1269 SP - 235 PB - VDI-Verl. CY - Düsseldorf ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schulz, C. A1 - Ehrfeld, W. A1 - Erbel, R. T1 - LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T. JF - 3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...] Y1 - 1994 N1 - Microengineering in Medicine and Biology Training Course 1994, Lausanne PB - REPRO EPFL CY - Lausanne ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schulz, C. A1 - Arnold, J. A1 - Detter, H. T1 - Anwendungen der LIGA-Technik für medizinische Diagnose- und Therapiesysteme. Schulz, C.; Arnold, J.; Detter, H.; Döpper, J.; Ehrfeld, W., Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T. JF - Elektrotechnik und Informationstechnik. 112 (1995), H. 9 Y1 - 1995 SN - 0932-383X SP - 493 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Wesner, D. A. A1 - Güntherodt, G. T1 - Thickness dependence of the spin- and angle-resolved photoemission of ultrathin, epitaxial Ni(111)/W(110) layers JF - Applied Physics A: Materials Science and Processing. 49 (1989), H. 6 Y1 - 1989 SN - 1432-0630 SP - 573 EP - 578 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. A1 - Gambino, R. J. T1 - CrO2—A New Half-Metallic Ferromagnet? Kämper, K.-P.; Schmitt, W.; Güntherodt, G.; Gambino, R. J., Ruf, R. JF - Physical Review Letters. 59 (1987), H. 24 Y1 - 1987 SN - 1079-7114 SP - 2788 EP - 2791 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - The influence of adsorbates on the spin-resolved photoemission of Ni(110). Schmitt, W.; Kämper, K.-P.; Güntherodt, G. JF - Surface Science. 189/190 (1987) Y1 - 1987 SN - 0039-6028 N1 - Proceedings of the Ninth European Conference on Surface Science SP - 741 EP - 507 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Effect of adsorbates on the spin-polarized photoemission of itinerant ferromagnets. Schmitt, W.; Kämper, K.-P.; Güntherodt, G. JF - Physical Review B. 36 (1987), H. 7 Y1 - 1987 SN - 1095-3795 SP - 3763 EP - 3768 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schmitt, W. A1 - Güntherodt, G. T1 - Thickness dependence of the electronic structure of ultrathin, epitaxial Ni(111)/W(110) layers. JF - Physical Review B. 38 (1988), H. 14 Y1 - 1988 SN - 1095-3795 SP - 9451 EP - 9456 ER -