TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Lehr, H.
A1  - Michel, F.
T1  - LIGA-Technik zur Fertigung von Mikroaktoren. Ehrfeld. W.; Kämper, K.-P.; Lehr, H.; Michel, F.
JF  - Mikroelektronik . 7 (1993), H. 5
Y1  - 1993
SN  - 0931-2714
SP  - LXIX
EP  - LXXI
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Hessel, V.
A1  - Lacher, M.
T1  - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.
JF  - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1
Y1  - 1997
SN  - 0-7803-3664-X
SP  - 71
EP  - 79
PB  - IEEE Service Center
CY  - Piscataway, NJ
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Hagemann, B.
A1  - Lehr, H.
T1  - Electromagnetic permanent magnet micromotor with integrated micro gear box. Kämper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Thürigen, C.; Wittig, T.
JF  - Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH
Y1  - 1996
N1  - International Conference on New Actuators <5, 1996, Bremen>
SP  - 429
CY  - Bremen
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Ehrfeld, W.
A1  - Döpper, J.
A1  - Hessel, V.
T1  - Microfluidic components for biological and chemical microreactors. Kämper, K.-P.; Ehrfeld, W.; Döpper, J.; Hessel, V.; Lehr, H.; Löwe, H.; Richter, T.; Wolf, A.
JF  - Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...
Y1  - 1997
SN  - 0-7803-3744-1
N1  - International Workshop on Micro-Electro-Mechanical Systems <10, 1997, Nagoya>
SP  - 338
EP  - 343
PB  - IEEE Service Center
CY  - Piscataway, NJ
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Ehrfeld, W.
A1  - Oberbeck, S.
T1  - A self-filling low-cost membrane micropump
JF  - Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division
Y1  - 1998
SN  - 078034412X
N1  - International Workshop on Micro-Electro-Mechanical Systems <11, 1998, Heidelberg>
SP  - 432
EP  - 437
PB  - IEEE Service Center
CY  - Piscataway, NJ
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Ehrfeld, W.
A1  - Hagemann, B.
T1  - Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.
JF  - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey
Y1  - 1995
SN  - 1-85312-390-0
SP  - 3
EP  - 10
PB  - Computational Mechanics Publ.
CY  - Southampton [u.a.]
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Ehrfeld, W.
A1  - Hagemann, B.
T1  - An investigation of computer modelling for micro-injection moulding. Hill, S.D.J.; Kämper, K.-P.; Dasbach, U.; Döpper, J.; Ehrfeld, W.; Kaupert, M.
JF  - Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey
Y1  - 1995
SN  - 1-85312-390-0
SP  - 275
PB  - Computational Mechanics Publ.
CY  - Southampton [u.a.]
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Döpper, J.
A1  - Clemens, M.
A1  - Ehrfeld, W.
T1  - Micro gear pumps for dosing of viscous fluids. / Döpper, J. (u.a.)
JF  - Journal of Micromechanics and Microengineering. 7 (1997), H. 3
Y1  - 1997
SN  - 0960-1317
SP  - 230
EP  - 232
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Berg, U.
A1  - Lehr, H.
A1  - Ehrfeld, W.
T1  - Experimentelle Untersuchungen zur automatisierten Mikrolinsenmontage. Berg, U.; Kämper, K.-P.; Lehr, H.; Ehrfeld, W.
JF  - Produktionstechnik für Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart
Y1  - 1996
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Abraham, M.
A1  - Ehrfeld, W.
A1  - Hessel, V.
T1  - Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.
JF  - Microelectronic Engineering. 41-42 (1998)
Y1  - 1998
SN  - 0167-9317
N1  - International Conference on Micro- and Nanofarbication <Athens, Greece, 15 September - 18 September 1998>
SP  - 47
EP  - 52
ER  -