TY - CHAP A1 - Platen, Johannes A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique N2 - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures. KW - Biosensor KW - Nanostructuring KW - layer expansion KW - pattern-size reduction KW - self-aligned patterning Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477 ER - TY - CHAP A1 - Schöning, Michael Josef A1 - Abouzar, Maryam H. A1 - Han, Y. A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Poghossian, Arshak T1 - Markierungsfreie DNA-Detektion mit Silizium-Feldeffektsensoren – Messeffekte oder Artefakte? T2 - Sensoren und Mess-Systeme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14.3.2006 in Freiburg/Breisgau Y1 - 2006 SN - 3-8007-2939-3 SP - 443 EP - 446 PB - VDE Verl. CY - Berlin ER - TY - CHAP A1 - Korsch, Helge A1 - Dafnis, Athanasios A1 - Reimerdes, Hans-Günther A1 - Braun, Carsten A1 - Ballmann, Josef T1 - Dynamic qualification of the HIRENASD elastic wing model T2 - Motto: Luft- und Raumfahrt: Lehre, Forschung, Industrie - gemeinsam innovativ. Deutscher Luft- und Raumfahrtkongress 2006 : Braunschweig, 06. bis 09. November 2006. Jahrbuch / Deutsche Gesellschaft für Luft- und Raumfahrt. 2006 Y1 - 2006 SP - 1441 EP - 1450 PB - Dt. Gesellschaft für Luft- und Raumfahrt - Lilienthal-Oberth (DGLR) CY - Bonn ER - TY - CHAP A1 - Poghossian, Arshak A1 - Schumacher, Kerstin A1 - Kloock, Joachim P. A1 - Rosenkranz, Christian A1 - Schultze, Joachim W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell N2 - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors. KW - Biosensor KW - Biosensorik KW - ISFET KW - Wafer KW - ISFET KW - wafer-level testing KW - capillary micro-droplet cell Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259 ER - TY - CHAP A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Platen, J. A1 - Schöning, Michael Josef T1 - Field-effect sensors with charged macromolecules – from micro towards nano aspects T2 - Biochemical Sensing Utilisation of Micro-and Nanotechnologies, Warschau, Nov. 2005 : Lecture Notes of the ICB Seminar / ed.: M. Mascini, W. Torbicz Y1 - 2006 SP - 74 EP - 81 PB - Polish Academy Sciences Press CY - Warsaw ER - TY - CHAP A1 - Platen, J. A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Präparation von selbstjustierenden Nanostrukturen mittels Schichtausdehnungstechnik T2 - Sensoren und Mess-Systeme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14.3.2006 in Freiburg/Breisgau Y1 - 2006 SN - 3-8007-2939-3 SP - 277 EP - 280 PB - VDE Verl. CY - Berlin ER - TY - CHAP A1 - Näther, Niko A1 - Poghossian, Arshak A1 - Platen, J. A1 - Yoshinobu, T. A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Multi-parameter sensing of both physical and (bio-)chemical quantities using the same transducer principle T2 - Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ... Y1 - 2006 SP - 172 EP - 181 CY - Warsaw ER - TY - CHAP A1 - Kurz, Melanie T1 - Recognition of shape in virtual visualizations T2 - Proceedings : November 15 - 17, 2006, Technische Universität Darmstadt, Darmstadt, Germany ; PACE, Partners for the advancement of collaborative engineering education Y1 - 2006 SN - 978-3-00-020161-5 N1 - International PACE Forum Collaborative Visualization ; (2006, Darmstadt) SP - 203 EP - 209 PB - Techn. Univ. CY - Darmstadt ER - TY - CHAP A1 - Herrmann, Ulf A1 - Worringer, S. A1 - Graeter, F. A1 - Nava, P. ED - Romero, Manuel T1 - Three Years of Operation Experience of the SKAL-ET Collector Loop at SEGS V T2 - 13th International Symposium Concentrated Solar Power and Chemical Energy Technologies, June 20 - 23, 2006, Seville, Spain Y1 - 2006 SN - 84-7834-519-1 PB - SolarPACES [u.a.] CY - [s.l.] ER - TY - CHAP A1 - Augenstein, Eckardt A1 - Herbergs, S. A1 - Kuperjans, Isabel T1 - Planung und Bewertung der Gebäudeenergieversorgung mit TOP-Energy T2 - Heizungs- und Raumlufttechnik : 1. Fachtagung Leonberg, 31. Januar bis 1. Februar 2006. - (VDI-Berichte ; Nr. 1921) Y1 - 2006 SN - 3-18-091921-3 N1 - Posterbeitrag SP - 57 EP - 60 PB - VDI-Verl. CY - Düsseldorf ER -