TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, J A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Lecture Notes of the ICB Seminars Y1 - 2002 SP - 55 EP - 66 PB - MCB CY - Warsaw ER -