TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
T1  - A novel silicon-based sensor array with capacitive EIS structures
JF  - Sensors and Actuators B. 47 (1998), H. 1-3
Y1  - 1998
SN  - 0925-4005
SP  - 225
EP  - 230
ER  -