TY - JOUR A1 - Vlasov, Y. G. A1 - Mourzina, Y. G. A1 - Legin, A. V. A1 - Ermelenko, Y. E. A1 - Schubert, J. A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition JF - Russian Journal of Applied Chemistry. 75 (2002), H. 3 Y1 - 2002 SN - 1070-4272 SP - 351 EP - 356 ER - TY - JOUR A1 - Kurowski, A. A1 - Schultze, J. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon. JF - Sensors and Actuators B. 83 (2002), H. 1-3 Y1 - 2002 SN - 0925-4005 N1 - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV SP - 123 EP - 128 ER - TY - JOUR A1 - Ermelenko, Y. A1 - Yoshinobu, T. A1 - Mourzina, Y. A1 - Furuichi, K. A1 - Levichev, S. A1 - Vlasov, Y. A1 - Schöning, Michael Josef A1 - Iwasaki, H. T1 - Lithium sensor based on the laser scanning semiconductor transducer JF - Analytica Chimica Acta. 459 (2002), H. 1 Y1 - 2002 SN - 0378-4304 SP - 1 EP - 9 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Lüth, H. T1 - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters JF - Proceedings of SPIE. 4576 (2002) Y1 - 2002 SP - 149 EP - 159 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - http://dx.doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Wang, Josepf A1 - Krause, Robin A1 - Block, Kirstin A1 - Musameh, Mustafa A1 - Mulchandani, Ashok A1 - Mulchandani, Priti A1 - Chen, Wilfred T1 - Dual amperometric-potentiometric biosensor detection system for monitoring organophosphorus neurotoxins JF - Analyica Chimica Acta. 469 (2002), H. 2 Y1 - 2002 SN - 0378-4304 SP - 197 EP - 203 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Kloock, Joachim P. A1 - Mourzina, Y. A1 - Schubert, J. T1 - A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials JF - Sensors. 2 (2002), H. 9 Y1 - 2002 SN - 1424-8220 SP - 356 EP - 365 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, A. A1 - Krings, T. A1 - Lüth, H. A1 - Wang, J. T1 - Evaluation of a chip-based thin-film / thick-film sensor hybrid for (bio-)chemical analysis JF - Electroanalysis Y1 - 2002 SN - 1040-0397 VL - 14 IS - 13 SP - 955 EP - 958 ER - TY - JOUR A1 - Ermelenko, Y. A1 - Yoshinobu, T. A1 - Mourzina, Y. A1 - Schöning, Michael Josef A1 - Vlasov, Y. A1 - Iwasaki, H. T1 - The hybrid K+/Ca2+ sensor based on laser scanned silicon transducer for multi-component analysis JF - Proceedings of ICAS 2001, IUPAC [3rd] International Congress on Analytical Sciences 2001 : August 6 - 10, 2001, Waseda University, Tokyo Y1 - 2002 N1 - International Congress on Analytical Sciences <2001, Tokyo> ; International Union of Pure and Applied Chemistry. Pure and applied chemistry ; 73,10. ; Analytical sciences ; 17.2001, special issue SP - i777 EP - i780 PB - Japan Society for Analytical Chemistry CY - Tokyo ER - TY - JOUR A1 - Mourzina, Y. A1 - Yoshinobu, T. A1 - Ermelenko, Y. A1 - Furuichi, K. A1 - Vlasov, Y. A1 - Schöning, Michael Josef A1 - Iwasaki, H. T1 - Technology of photocurable membranes for ion sensors based on laser scanned semiconductor transducer (LSST) JF - Book of abstracts / ed. by J. Saneistr. Y1 - 2002 SN - 80-01-02576-4 N1 - Eurosensors ; (16, 2002, Praha) SP - 254 EP - 257 PB - Czech Technical University, Faculty of Electrical Engineering, Department of Measurement CY - Prague ER -