TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies JF - Sensors and Actuators B. 108 (2005), H. 1-2 Y1 - 2005 SN - 0925-4005 N1 - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004 SP - 986 EP - 992 ER - TY - JOUR A1 - Simonis, A. A1 - Dawgul, M. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 U6 - http://dx.doi.org/10.1016/j.electacta.2005.04.063 SP - 930 EP - 937 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Ronkel, F. A1 - Crott, M. A1 - Thust, M. (u.a.) T1 - Miniaturization of potentiometric sensors using porous silicon microtechnology JF - Electrochimica Acta. 42 (1997), H. 22 Y1 - 1997 SN - 0013-4686 SP - 3185 EP - 3193 ER - TY - JOUR A1 - Miyamoto, Ko-ichiro A1 - Kaneko, Kazumi A1 - Matsuo, Akira A1 - Wagner, Torsten A1 - Kanoh, Shin`ichiro A1 - Schöning, Michael Josef A1 - Yoshinobu, Tatsuo T1 - Miniaturized chemical imaging sensor system using an OLED display panel JF - Procedia Engineering. 5 (2010) Y1 - 2010 SN - 1877-7058 N1 - Eurosensor XXIV Conference SP - 516 EP - 519 ER - TY - JOUR A1 - Miyamoto, Ko-ichiro A1 - Kaneko, Kazumi A1 - Matsuo, Akira A1 - Wagner, Torsten A1 - Kanoh, Shiníchiro A1 - Schöning, Michael Josef A1 - Yoshinobu, Tatsuo T1 - Miniaturized chemical imaging sensor system using an OLED display panel JF - Sensors and Actuators B: Chemical N2 - The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the two-dimensional distribution of specific ions or molecules in the solution. In this study, we developed a miniaturized chemical imaging sensor system with an OLED display panel as a light source that scans the sensor plate. In the proposed configuration, the display panel is placed directly below the sensor plate and illuminates the back surface. The measured area defined by illumination can be arbitrarily customized to fit the size and the shape of the sample to be measured. The waveform of the generated photocurrent, the current–voltage characteristics and the pH sensitivity were investigated and pH imaging with this miniaturized system was demonstrated. KW - LAPS KW - Light-addressable potentiometric sensor KW - Chemical imaging sensor KW - Organic light-emitting diode display Y1 - 2012 U6 - http://dx.doi.org/10.1016/j.snb.2011.02.029 SN - 0925-4005 N1 - Part of special issue "Eurosensors XXIV, 2010" VL - 170 SP - 82 EP - 87 PB - Elsevier CY - Amsterdam ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 554 EP - 555 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Molinnus, Denise A1 - Iken, Heiko A1 - Johnen, Anna Lynn A1 - Richstein, Benjamin A1 - Hellmich, Lena A1 - Poghossian, Arshak A1 - Knoch, Joachim A1 - Schöning, Michael Josef T1 - Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition JF - physica status solidi (a) applications and materials science N2 - Miniaturized electrolyte–insulator–semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al–p-Si–Ta2O5(5 nm), Al–p-Si–Si3N4(1 or 2 nm)–Ta2O5 (5 nm), and Al–p-Si–SiO2(3.6 nm)–Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance–voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2–Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)–Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance–voltage curve among the studied stacked gate insulator systems. KW - atomic layer deposition KW - capacitive field-effect sensors KW - pH sensors KW - ultrathin gate insulators Y1 - 2022 U6 - http://dx.doi.org/10.1002/pssa.202100660 SN - 1862-6319 VL - 219 IS - 8 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Lüth, H. A1 - Schultze, J.W. T1 - Modifications and characterization of a silicon-based microelectrode array JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3899 EP - 3910 ER - TY - JOUR A1 - Gasparyan, F.V. A1 - Vitusevich, S.A. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Modified charge fluctuation noise model for electrolyte-insulator-semiconductor devices JF - Modern Physics Letters B (MPLB). 25 (2011), H. 11 Y1 - 2011 SN - 0217-9849 SP - 831 EP - 840 PB - World Scientific Publ. CY - Singapur ER - TY - JOUR A1 - Bohrn, U. A1 - Stütz, E. A1 - Fuchs, K. A1 - Fleischer, M. A1 - Schöning, Michael Josef A1 - Wagner, P. T1 - Monitoring of irritant gas using a whole-cell-based sensor system JF - Sensors and Actuators B: Chemical N2 - Cell-based sensors for the detection of gases have long been underrepresented, due to the cellular requirement of being cultured in a liquid environment. In this work we established a cell-based gas biosensor for the detection of toxic substances in air, by adapting a commercial sensor chip (Bionas®), previously used for the measurement of pollutants in liquids. Cells of the respiratory tract (A549, RPMI 2650, V79), which survive at a gas phase in a natural context, are used as biological receptors. The physiological cell parameters acidification, respiration and morphology are continuously monitored in parallel. Ammonia was used as a highly water-soluble model gas to test the feasibility of the sensor system. Infrared measurements confirmed the sufficiency of the medium draining method. This sensor system provides a basis for many sensor applications such as environmental monitoring, building technology and public security. Y1 - 2012 U6 - http://dx.doi.org/10.1016/j.snb.2012.05.088 SN - 0925-4005 VL - 175 SP - 208 EP - 217 PB - Elsevier CY - Amsterdam ER -