TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, Anette
A1  - Ruge, Christian
A1  - Ecken, Holger
A1  - Müller-Veggian, Mattea
A1  - Lüth, Hans
T1  - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
JF  - Sensors. 2 (2002), H. 1
N2  - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Y1  - 2002
SN  - 1424-8220
U6  - http://dx.doi.org/10.3390/s20100011
SP  - 11
EP  - 22
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, A.
A1  - Krings, T.
A1  - Lüth, H.
A1  - Wang, J.
T1  - Evaluation of a chip-based thin-film / thick-film sensor hybrid for (bio-)chemical analysis
JF  - Electroanalysis
Y1  - 2002
SN  - 1040-0397
VL  - 14
IS  - 13
SP  - 955
EP  - 958
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schütz, S.
A1  - Schroth, P.
A1  - Weißbecker, B.
A1  - Steffen, A.
A1  - Kordos, P.
A1  - Hummel, Hans E.
T1  - A BioFET on the basis of intact insect antennae
JF  - Sensors and Actuators B. 47 (1998), H. 1-3
Y1  - 1998
SN  - 0925-4005
SP  - 235
EP  - 238
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schütz, S.
A1  - Riemer, A.
A1  - Weißbecker, B.
A1  - Steffen, A.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Hummel, Hans E.
T1  - A BioFET on the basis of intact insect antennae
JF  - Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.
Y1  - 1997
SN  - 83-908335-0-6
N1  - Eurosensors ; (11, 1997, Warszawa) ; Eurosensors - European Conference on Solid-State Transducers ; (11 : ; 1997.09.21-24 : ; Warsaw)
SP  - 1461
EP  - 1464
PB  - Sensor Lab Sp.
CY  - Warsaw
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, Jürgen
A1  - Zander, Willy
A1  - Müller-Veggian, Mattea
T1  - Pulsed laser deposition as a novel preparation technique for chemical microsensors
JF  - Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)
Y1  - 1999
SP  - 124
EP  - 134
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, Joachim P.
A1  - Kloock, Joachim P.
A1  - Zander, W.
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Innovative thin film techniques for microfabricating electrochemical sensors
JF  - Biocybernetics and Biomedical Engineering. 21 (2001), H. 4
Y1  - 2001
SN  - 0208-5216
SP  - 107
EP  - 119
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schubert, J
A1  - Kloock, Joachim P.
A1  - Zander, W.
A1  - Mourzina, Y. G.
A1  - Legin, A.
A1  - Vlasov, Y. G.
A1  - Lüth, H.
T1  - Innovative thin film techniques for microfabricating electrochemical sensors
JF  - Lecture Notes of the ICB Seminars
Y1  - 2002
SP  - 55
EP  - 66
PB  - MCB
CY  - Warsaw
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schroth, Peter
A1  - Lüth, Hans
A1  - Hummel, Hans E.
A1  - Schütz, Stefan
T1  - Insect chemoreceptors coupled to silicon transistors as innovative biosensors
JF  - Proceedings of SPIE. 4205 (2001)
Y1  - 2001
SP  - 152
EP  - 162
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schroth, P.
A1  - Schütz, S.
A1  - Hummel, Hans E.
A1  - Lüth, H.
T1  - Connecting an insect antenna to a microchip as a novel type of biosensor
JF  - Proceedings : applications, trends, visions / VDE World Microtechnologies Congress, September 25 - 27, 2000, Expo 2000, Hannover, Germany. Organized by VDE Association for Electrical, Electronic & Information Technologies ....Vol 2.
Y1  - 2000
SN  - 3-8007-2579-7
N1  - MICRO.tec <1, 2000, Hannover>; auch als CD-ROM
SP  - 411
EP  - 416
PB  - VDE-Verl.
CY  - [Berlin] [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schroth, P.
A1  - Schütz, S.
T1  - The use of insect chemoreceptors for the assembly of biosensors based on semiconductor field-effect sensors
JF  - Electroanalysis. 12 (2000), H. 9
Y1  - 2000
SN  - 1040-0397
SP  - 645
EP  - 652
ER  -