TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, J A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Lecture Notes of the ICB Seminars Y1 - 2002 SP - 55 EP - 66 PB - MCB CY - Warsaw ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Microfabricated semiconductor structures – Advances in (bio-)chemical sensing JF - Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed. Y1 - 2002 SN - 3-540-43699-5 SP - 79 EP - 92 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Schroth, P. A1 - Weißbecker, B. A1 - Schütz, S. A1 - Ecken, H. A1 - Yoshinobu, T. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Bioelectronic signal processing - intact chemoreceptors coupled to field-effect devices JF - Lecture Notes of the ICB Seminars Y1 - 2002 SP - 28 EP - 42 PB - MCB CY - Warsaw ER - TY - JOUR A1 - Schöning, Michael Josef T1 - Novel approaches to design siliconbased field-effect sensors JF - Electrochemical Microsystem Technologies, New Trends in Electrochemistry Vol. 2 Y1 - 2002 SP - 384 EP - 408 PB - Taylor & Francis CY - London New York ER - TY - JOUR A1 - Kurowski, A. A1 - Schultze, J. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon. JF - Sensors and Actuators B. 83 (2002), H. 1-3 Y1 - 2002 SN - 0925-4005 N1 - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV SP - 123 EP - 128 ER - TY - JOUR A1 - Ermelenko, Y. A1 - Yoshinobu, T. A1 - Mourzina, Y. A1 - Furuichi, K. A1 - Levichev, S. A1 - Vlasov, Y. A1 - Schöning, Michael Josef A1 - Iwasaki, H. T1 - Lithium sensor based on the laser scanning semiconductor transducer JF - Analytica Chimica Acta. 459 (2002), H. 1 Y1 - 2002 SN - 0378-4304 SP - 1 EP - 9 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Lüth, H. T1 - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters JF - Proceedings of SPIE. 4576 (2002) Y1 - 2002 SP - 149 EP - 159 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - https://doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Artmann, Gerhard A1 - Trzewik, Jürgen A1 - Ates, M. T1 - A novel method to quantify mechanical tension in cell monolayers. Trzewik, Jürgen; Ates, M., Artmann, Gerhard Michael JF - Biomedizinische Technik. 47 (2002), H. Suppl. 1. Pt. 1 Y1 - 2002 SN - 0013-5585 N1 - Druckausgabe unter 63 Z 47 vorhanden SP - 379 EP - 381 ER - TY - JOUR A1 - Maggakis-Kelemen, Christina A1 - Biselli, Manfred A1 - Artmann, Gerhard T1 - Determination of the elastic shear modulus of cultured human red blood cells JF - Biomedizinische Technik. 47 (2002), H. Suppl. 1 Pt. 1 Y1 - 2002 SN - 0013-5585 N1 - Druckausgabe unter 63 Z 471 vorhanden SP - 106 EP - 109 ER -