TY  - JOUR
A1  - Prume, Klaus
A1  - Muralt, Paul
A1  - Calame, Florian
A1  - Schmitz-Kempen, Thorsten
T1  - Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 407
EP  - 411
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Booij, W. E.
A1  - Vogl, A. H.
A1  - Wang, D. T.
T1  - A simple and powerful analytical model for MEMS piezoelectric multimorphs  / Booij, W. E. ; Vogl, A. H. ; Wang, D. T. ; Tyholdt, F. ; Ostbo, N. P. ; Raeder, H. ; Prume, K.
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 387
EP  - 393
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Tyholdt, F.
A1  - Calame, F.
A1  - Raeder, H.
T1  - Chemically derived seeding layer for {100}-textured PZT thin films   / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 311
EP  - 314
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Raeder, H.
A1  - Tyholdt, F.
A1  - Booij, W. E.
T1  - Taking piezoelectric microsystems from the laboratory to production  / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 357
EP  - 362
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Peter, F.
A1  - Rüdiger, A.
A1  - Dittmann, R.
T1  - Analysis of shape effects on the piezoresponse in ferroelectric nanograins with and without adsorbates / Peter, F. ; Rüdiger, A. ; Dittmann, R. ; Waser, R. ; Szot, K. ; Reichenberg, B. ; Prume, K. ;
JF  - Applied Physics Letters  . 87 (2005), H. 8
Y1  - 2005
SN  - 0003-6951
SP  - 082901
EP  - 082901-3
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Gerber, Peter
A1  - Kügeler, Carsten
A1  - Roelofs, Andreas
T1  - Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size  / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen,
Y1  - 2004
SN  - 0-7803-8410-5
N1  - 14th IEEE International Symposium on  Applications of Ferroelectrics, 2004. ISAF-04. 2004
SP  - 7
EP  - 10
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Tiedke, S.
A1  - Schmitz, T.
A1  - Roelofs, A.
T1  - Direct hysteresis measurements of single nanosized ferroelectric capacitors contacted with an atomic force microscope / Tiedke, S. ; Schmitz, T. ; Prume, K. ; Roelofs, A. ; Schneller, T. ; Kall, U. ; Waser, R. ; Ganpule, C. S. ; Nagarajan, V. ; Stanishevs
JF  - Applied Physics Letters. 79 (2001), H. 22
Y1  - 2001
SN  - 0003-6951
SP  - 3678
EP  - 3680
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Gerber, P.
A1  - Roelofs, A.
A1  - Kügeler, C.
T1  - Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films / Gerber, P. ; Roelofs, A. ; Kügeler, C.;  Böttger, U. ; Waser, R. ; Prume, K. ;
JF  - Journal of Applied Physics  . 96 (2004), H. 5
Y1  - 2004
SN  - 0021-8979
SP  - 2800
EP  - 2804
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Waser, Rainer
T1  - Finite-element simulation of coupled characteristics of ceramic multilayer capacitors under transient electrical loading / Prume, Klaus ; Waser, Rainer
JF  - Proceedings of the 2000 12th IEEE International Symposium on  Applications of Ferroelectrics. Vol. 2
Y1  - 2000
N1  - ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on  Applications of Ferroelectrics
SP  - 675
EP  - 678
ER  - 
TY  - JOUR
A1  - Prume, Klaus
T1  - Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application  /  Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;
Y1  - 2007
N1  - ISAF 2007. Sixteenth IEEE International Symposium on  Applications of Ferroelectrics, 2007
SP  - 702
ER  -