TY - CHAP A1 - Moritz, Werner A1 - Yoshinobu, Tatsuo A1 - Finger, Friedhelm A1 - Krause, Steffi A1 - Schöning, Michael Josef T1 - Amorphous silicon as semiconductor material for high resolution LAPS T2 - Eurosensors XVII : the 17th European Conference on Solid-State Transducers ; University of Minho, Guimarães, Portugal, September 21 - 24, 2003 Y1 - 2003 SP - 48 EP - 49 ER -