TY - CHAP A1 - Chaiyboun, Ali A1 - Traute, Rüdiger A1 - Kiesewetter, Olaf A1 - Ahlers, Simon A1 - Müller, Gerhard A1 - Doll, Theodor T1 - Modular analytical multicomponent analysis in gas sensor arrays N2 - A multi-sensor system is a chemical sensor system which quantitatively and qualitatively records gases with a combination of cross-sensitive gas sensor arrays and pattern recognition software. This paper addresses the issue of data analysis for identification of gases in a gas sensor array. We introduce a software tool for gas sensor array configuration and simulation. It concerns thereby about a modular software package for the acquisition of data of different sensors. A signal evaluation algorithm referred to as matrix method was used specifically for the software tool. This matrix method computes the gas concentrations from the signals of a sensor array. The software tool was used for the simulation of an array of five sensors to determine gas concentration of CH4, NH3, H2, CO and C2H5OH. The results of the present simulated sensor array indicate that the software tool is capable of the following: (a) identify a gas independently of its concentration; (b) estimate the concentration of the gas, even if the system was not previously exposed to this concentration; (c) tell when a gas concentration exceeds a certain value. A gas sensor data base was build for the configuration of the software. With the data base one can create, generate and manage scenarios and source files for the simulation. With the gas sensor data base and the simulation software an on-line Web-based version was developed, with which the user can configure and simulate sensor arrays on-line. KW - Biosensor KW - Main sensitivity KW - cross sensitivity KW - matrix method KW - gas sensor array KW - modelling Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1358 ER - TY - JOUR A1 - Doll, Theodor A1 - Wagner, Torsten A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Engineering of functional interfaces / Theodor Doll ; Torsten Wagner ; Patrick Wagner ; Michael J. Schöning (eds.) JF - Physica status solidi (a) Y1 - 2016 U6 - http://dx.doi.org/10.1002/pssa.201670641 SN - 1862-6319 VL - 213 IS - 6 SP - 1393 EP - 1394 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Doll, Theodor A1 - Wagner, Patrick T1 - Preface / Doll, Theodor ; Wagner, Patrick ; Schöning, Michael J. JF - physica status solidi (a) . 206 (2009), H. 3 Y1 - 2009 SN - 1862-6319 N1 - Special Issue: Engineering of Functional Interfaces (EnFI 08) SP - 389 EP - 390 ER - TY - CHAP A1 - Spannhake, Jan A1 - Schulz, Olaf A1 - Helwig, Andreas A1 - Krenkow, Angelika A1 - Müller, Gerhard A1 - Doll, Theodor T1 - High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials N2 - Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements. KW - Biosensor KW - Hotplate KW - heater metallisation KW - high-temperature stability KW - electro-migration KW - doped silicon KW - doped metal oxide KW - antimony doped tin oxide Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1513 ER - TY - JOUR A1 - Wagner, Patrick A1 - Doll, Theodor A1 - Schöning, Michael Josef T1 - Engineering of functional interfaces / Patrick Wagner ; Theodor Doll ; Michael J. Schöning (eds.) JF - Physica status solidi (A) : Applications and materials science Y1 - 2014 U6 - http://dx.doi.org/10.1002/pssa.201470241 SN - 1521-396X (E-Book); 1862-6319 (E-Book); 0031-8965 (Print); 1862-6300 (Print) VL - 211 IS - 6 SP - 1339 EP - 1339 PB - Wiley-VCH CY - Weinheim ER -