TY - JOUR A1 - Poghossian, Arshak A1 - Wagner, Holger A1 - Schöning, Michael Josef T1 - Functional testing and characterisation of (bio-)chemical sensors on wafer level JF - Procedia Chemistry. 1 (2009), H. 1 Y1 - 2009 SN - 1876-6196 N1 - Proceedings of the Eurosensors XXIII conference ; Eurosensors 23 SP - 835 EP - 838 ER -