TY  - JOUR
A1  - Schäfer, Horst
A1  - Boege, P.
A1  - Shanjia, Xu
A1  - Xinzhang, Wu (u.a.)
T1  - Improved conductivity-measurement of semiconductor epitaxial layers by means of the contactless microwave method
JF  - Conference digest : 10 - 14 January 1994, San Diego, California / International Conference on Millimeter and Submillimeter Waves and Applications / Mohammed N. Afsar, chair/ed.
Y1  - 1994
SN  - 0-8194-1558-8
N1  - Serie Proceedings / SPIE, The International Society for Optical Engineering ; 2250
SP  - 649
EP  - 658
PB  - SPIE
CY  - Bellingham, Wash.
ER  -