TY  - JOUR
A1  - Kurowski, A.
A1  - Schultze, J.W.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Micro- and nanopatterning of sensor chips by means of macroporous silicon
JF  - Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.)
Y1  - 2001
SN  - 3-540-42150-5
N1  - Eurosensors (15, 2001, München) ; International Conference on Solid State Sensors and Actuators (11, 2001, München)
SP  - 640
EP  - 643
PB  - Springer
CY  - Berlin [u.a.]
ER  -