TY - JOUR A1 - Schöning, Michael Josef A1 - Crott, M. A1 - Ronkel, F. A1 - Thust, M. A1 - Schultze, J. W. A1 - Kordos, P. A1 - Lüth, H. T1 - Investigations on porous silicon layers with regard to chemical microsensor applications JF - Third International Conference on Intelligent Materials : Lyon, 3-4-5 June 1996, Center of Congress "L'Espace Tête d'Or" / [publ. by SPIE, the International Society for Optical Engineering]. General chair/ed. by: P. F. Gobin Y1 - 1996 SN - 0819421650 N1 - International Conference on Intelligent Materials ; (3, 1996, Lyon) SP - 275 EP - 280 PB - SPIE CY - Bellingham, Wash. ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Crott, M. A1 - Ronkel, F. A1 - Thust, M. A1 - Schultze, J. W. A1 - Kordos, P. A1 - Lüth, H. T1 - A capacitive chemical sensor based on porous silicon JF - Proceedings of the 26th European Solid State Device Research Conference : Congress Centre, Bologna, Italy, 9 - 11 September 1996 / ESSDERC '96. Ed. by G. Baccarani Y1 - 1996 SN - 2-86332-196-X N1 - ESSDERC ; (26, 1996, Bologna) ; European Solid State Device Research Conference (ESSDERC) SP - 907 EP - 910 PB - Ed. Frontières CY - Gif-sur-Yvette ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Kordos, P. A1 - Lüth, H. A1 - Ronkel, F. A1 - Schultze, J. W. T1 - Halbleiter-Schichtstrukturen mit porösem Silizium als Chemo- und Biosensoren JF - ITG-Fachbericht. 148 (1998) Y1 - 1998 SN - 0341-0196 SP - 33 EP - 40 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Faßbender, F. A1 - Glück, O. A1 - Schmitt, G. A1 - Schultze, J. W. A1 - Lüth, H. T1 - A silicon-based microelectrode array for chemical analysis JF - Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou Y1 - 1998 N1 - International Meeting on Chemical Sensors ; (7, 1998, Beijing) ; International Meeting on Chemical Sensors (IMCS) ; (7 : ; 1998.07.27-30 : ; Beijing) SP - 100 EP - 102 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Faßbender, F. A1 - Schmitt, G. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Buß, G. A1 - Schultze, J. W. T1 - Passivation and corrosion of microsensor devices exemplified at microelectrode arrays JF - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1. Y1 - 1999 SN - 90-76699-02-X N1 - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague) SP - 953 EP - 956 CY - The Hague, The Netherlands ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Kurowski, A. A1 - Thust, M. A1 - Kordos, P. A1 - Schultze, J. W. A1 - Lüth, H. T1 - Capacitive microsensors for biochemical sensing on porous silicon technology JF - Sensors and Actuators B. 64 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 59 EP - 64 ER - TY - JOUR A1 - Faßbender, F. A1 - Schmitt, G. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Buß, G. A1 - Schultze, J. W. T1 - Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 128 EP - 133 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Faßbender, F. A1 - Glück, O. A1 - Schmitt, G. A1 - Schultze, J. W. A1 - Lüth, H. T1 - A silicon-based microelectrode array for chemical analysis JF - Sensors and Actuators B. 65 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 284 EP - 287 ER - TY - JOUR A1 - Schmitt, G. A1 - Faßbender, F. A1 - Lüth, H. A1 - Schöning, Michael Josef A1 - Schultze, J. W. A1 - Buß, G. T1 - Passivation and corrosion of microelectrode arrays JF - Materials and Corrosion. 51 (2000), H. 1 Y1 - 2000 SN - 0947-5117 SP - 20 EP - 25 ER - TY - JOUR A1 - Buß, G. A1 - Ecken, H. A1 - Winkels, S. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Schultze, J. W. T1 - Galvanic modifications of multifunctional silicon-based microelectrode arrays JF - Electrochemical technology applications in electronics : proceedings of the third international symposium / [International Symposium on Electrochemical Technology Applications in Electronics, held during October 20 - 22, 1999, Honolulu, Hawaii]. Electrodeposition Division. Ed.: L. T. Romankiw Y1 - 2000 SN - 1566772575 N1 - International Symposium on Electrochemical Technology Applications in Electronics ; (3, 1999, Honolulu, Hawaii) ; Proceedings volume // Electrochemical Society ; 99-34 SP - 209 EP - 215 PB - Electrochemical Society CY - Pennington, NJ ER -