TY - JOUR A1 - Molinnus, Denise A1 - Iken, Heiko A1 - Johnen, Anna Lynn A1 - Richstein, Benjamin A1 - Hellmich, Lena A1 - Poghossian, Arshak A1 - Knoch, Joachim A1 - Schöning, Michael Josef T1 - Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition JF - physica status solidi (a) applications and materials science N2 - Miniaturized electrolyte–insulator–semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al–p-Si–Ta2O5(5 nm), Al–p-Si–Si3N4(1 or 2 nm)–Ta2O5 (5 nm), and Al–p-Si–SiO2(3.6 nm)–Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance–voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2–Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)–Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance–voltage curve among the studied stacked gate insulator systems. KW - atomic layer deposition KW - capacitive field-effect sensors KW - pH sensors KW - ultrathin gate insulators Y1 - 2022 U6 - http://dx.doi.org/10.1002/pssa.202100660 SN - 1862-6319 VL - 219 IS - 8 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Gasparyan, F.V. A1 - Vitusevich, S.A. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Modified charge fluctuation noise model for electrolyte-insulator-semiconductor devices JF - Modern Physics Letters B (MPLB). 25 (2011), H. 11 Y1 - 2011 SN - 0217-9849 SP - 831 EP - 840 PB - World Scientific Publ. CY - Singapur ER - TY - JOUR A1 - Schusser, Sebastian A1 - Krischer, Maximillian A1 - Bäcker, Matthias A1 - Poghossian, Arshak A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Monitoring of the Enzymatically Catalyzed Degradation of Biodegradable Polymers by Means of Capacitive Field-Effect Sensors JF - Analytical Chemistry N2 - Designing novel or optimizing existing biodegradable polymers for biomedical applications requires numerous tests on the effect of substances on the degradation process. In the present work, polymer-modified electrolyte–insulator–semiconductor (PMEIS) sensors have been applied for monitoring an enzymatically catalyzed degradation of polymers for the first time. The thin films of biodegradable polymer poly(d,l-lactic acid) and enzyme lipase were used as a model system. During degradation, the sensors were read-out by means of impedance spectroscopy. In order to interpret the data obtained from impedance measurements, an electrical equivalent circuit model was developed. In addition, morphological investigations of the polymer surface have been performed by means of in situ atomic force microscopy. The sensor signal change, which reflects the progress of degradation, indicates an accelerated degradation in the presence of the enzyme compared to hydrolysis in neutral pH buffer media. The degradation rate increases with increasing enzyme concentration. The obtained results demonstrate the potential of PMEIS sensors as a very promising tool for in situ and real-time monitoring of degradation of polymers. Y1 - 2015 U6 - http://dx.doi.org/10.1021/acs.analchem.5b00617 SN - 1520-6882 VL - 87 IS - 13 SP - 6607 EP - 6613 PB - ACS Publications CY - Washington, DC ER - TY - JOUR A1 - Kirchner, Patrick A1 - Oberländer, Jan A1 - Suco, Henri-Pierre A1 - Rysstad, Gunnar A1 - Schöning, Michael Josef T1 - Monitoring the microbicidal effectiveness of gaseous hydrogen peroxide in sterilisation processes by means of a calorimetric gas sensor JF - Food control N2 - In the present work, a novel method for monitoring sterilisation processes with gaseous H2O2 in combination with heat activation by means of a specially designed calorimetric gas sensor was evaluated. Therefore, the sterilisation process was extensively studied by using test specimens inoculated with Bacillus atrophaeus spores in order to identify the most influencing process factors on its microbicidal effectiveness. Besides the contact time of the test specimens with gaseous H2O2 varied between 0.2 and 0.5 s, the present H2O2 concentration in a range from 0 to 8% v/v (volume percent) had a strong influence on the microbicidal effectiveness, whereas the change of the vaporiser temperature, gas flow and humidity were almost negligible. Furthermore, a calorimetric H2O2 gas sensor was characterised in the sterilisation process with gaseous H2O2 in a wide range of parameter settings, wherein the measurement signal has shown a linear response against the H2O2 concentration with a sensitivity of 4.75 °C/(% v/v). In a final step, a correlation model by matching the measurement signal of the gas sensor with the microbial inactivation kinetics was established that demonstrates its suitability as an efficient method for validating the microbicidal effectiveness of sterilisation processes with gaseous H2O2. KW - hydrogen peroxide KW - sterilisation KW - Bacillus atrophaeus KW - calorimetric gas sensor Y1 - 2012 U6 - http://dx.doi.org/10.1016/j.foodcont.2012.11.048 SN - 0956-7135 VL - 31 IS - 2 SP - 530 EP - 538 PB - Elsevier CY - Amsterdam ER - TY - JOUR A1 - Yoshinobu, T. A1 - Ermelenko, Y. A1 - Mourzina, Y. A1 - Schöning, Michael Josef A1 - Iwasaki, H. A1 - Vlasov, Y. T1 - Multi-component analysis based on the light-addressable potentiometric sensor (LAPS) JF - Proceedings : 11th international conference Sensor 2003; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany Y1 - 2003 N1 - Internationale Messe mit Kongress Sensor <11, 2003, Nürnberg> SP - 141 EP - 144 PB - AMA Service CY - Wunstorf ER - TY - CHAP A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Buniatyan, V. A1 - Schöning, Michael Josef T1 - Multi-parameter detection for supporting monitoring and control of biogas processes in agriculture T2 - Sensoren und Messsysteme 2014 ; Beiträge der 17. GMA/ITG-Fachtagung vom 3. bis 4. Juni 2014 in Nürnberg. (ITG-Fachbericht ; 250) Y1 - 2014 SN - 978-3-8007-3622-5 SP - 1 EP - 5 PB - VDE-Verl. CY - Berlin ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Multi-parameter detection of (bio-)chemical and physical quantities using an identical transducer principle JF - Sensors and Actuators B. 91 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 83 EP - 91 ER - TY - CHAP A1 - Näther, Niko A1 - Poghossian, Arshak A1 - Platen, J. A1 - Yoshinobu, T. A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Multi-parameter sensing of both physical and (bio-)chemical quantities using the same transducer principle T2 - Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ... Y1 - 2006 SP - 172 EP - 181 CY - Warsaw ER - TY - JOUR A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Bäcker, Matthias A1 - Reisert, Steffen A1 - Kramer, Friederike A1 - Begoyan, Vardges K. A1 - Buniatyan, Vahe V. A1 - Schöning, Michael Josef T1 - Multi-parameter sensing using high-k oxide of barium strontium titanate JF - Physica status solidi (a) N2 - High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed. Y1 - 2015 U6 - http://dx.doi.org/10.1002/pssa.201431911 SN - 1862-6319 VL - 212 IS - 6 SP - 1259 PB - Wiley CY - Weinheim ER - TY - JOUR A1 - Reisert, Steffen A1 - Schneider, Benno A1 - Geissler, Hanno A1 - Gompel, Matthias van A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Multi-sensor chip for the investigation of different types of metal oxides for the detection of H2O2 in the ppm range JF - physica status solidi (a) N2 - In this work, a multi-sensor chip for the investigation of the sensing properties of different types of metal oxides towards hydrogen peroxide in the ppm range is presented. The fabrication process and physical characterization of the multi-sensor chip are described. Pure SnO2 and WO3 as well as Pd- and Pt-doped SnO2 films are characterized in terms of their sensitivity to H2O2. The sensing films have been prepared by drop-coating of water-dispensed nano-powders. A physical characterization, including scanning electron microscopy and X-ray diffraction analysis of the deposited metal-oxide films, was done. From the measurements in hydrogen peroxide atmosphere, it could be shown, that all of the tested metal oxide films are suitable for the detection of H2O2 in the ppm range. The highest sensitivity and reproducibility was achieved using Pt-doped SnO2. Calibration plot of a SnO2, WO3, Pt-, and Pd-doped SnO2 gas sensor for H2O2 concentrations in the ppm range. Y1 - 2013 SN - 1862-6319 VL - 210 IS - 5 SP - 898 EP - 904 PB - Wiley CY - Weinheim ER -