TY  - JOUR
A1  - Hagemann, Hans-Jürgen
A1  - Geittner, P.
A1  - Warnier, J.
A1  - Wilson, H.
T1  - PCVD at high deposition rates. Geittner, P.; Hagemann, H. J.; Warnier, J.; Wilson, H.
JF  - Journal of Lightwave Technology (J-LT) / Institute of Electrical and Electronics Engineers (IEEE). 4 (1986), H. 7
Y1  - 1986
SN  - 0733-8724
SP  - 818
EP  - 822
ER  -