TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Steffen, A.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Kauffmann, F.
A1  - Hoffmann, B.
T1  - Halbleiter-Biosensoren für den Penicillin-Nachweis in wäßrigen Lösungen
JF  - Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. März 1996 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik.
Y1  - 1996
SN  - 3-18-091255-3
N1  - VDI-Berichte; 1255
SP  - 143
EP  - 148
PB  - VDI-Verl.
CY  - Düsseldorf
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
T1  - A novel silicon-based sensor array with capacitive EIS structures
JF  - Sensors and Actuators B. 47 (1998), H. 1-3
Y1  - 1998
SN  - 0925-4005
SP  - 225
EP  - 230
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Kordos, P.
A1  - Schultze, J.W.
A1  - Lüth, H.
T1  - Capacitive microsensors for biochemical sensing based on porous silicon technology
JF  - Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek
Y1  - 2000
N1  - International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai)
SP  - 1184
EP  - 1187
PB  - Elsevier
CY  - Amsterdam [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Kordos, P.
A1  - Lüth, H.
A1  - Ronkel, F.
A1  - Schultze, J. W.
T1  - Halbleiter-Schichtstrukturen mit porösem Silizium als Chemo- und Biosensoren
JF  - ITG-Fachbericht. 148 (1998)
Y1  - 1998
SN  - 0341-0196
SP  - 33
EP  - 40
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Chemical sensing structures - From EIS capacitors to array-type sensors
JF  - Solid state chemical and biochemical sensors : proceedings of Topical Symposium 9 - "Solid State Chemical and Biochemical Sensors" of the Forum on New Materials of the 9th CIMTEC-World Ceramics Congress and Forum on New Materials Florence, Italy June 14-1
Y1  - 1999
SN  - 88-86538-27-8
N1  - Serie Advances in science and technology ; 26
SP  - 55
EP  - 62
PB  - Techna
CY  - Faenza
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
T1  - Die „Zukunftswerkstatt Biosensorik“ – ein Netzwerk für Lehre, Forschungs und Wirtschaft
JF  - Fachblatt Fachhochschule Aachen (2003)
Y1  - 2003
SN  - 1430-7707
SP  - 6
EP  - 7
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
T1  - Miniaturisierbare Halbleitersensoren für die Penicillinbestimmung in der Biotechnologie
JF  - MessTec. 3 (1996)
Y1  - 1996
SN  - 0947-4234
SP  - 82
EP  - 85
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Steffen, A.
A1  - Sanke, M. S.
A1  - Müller-Veggian, Mattea
T1  - Kapazitiver Silizium-Sensor als Ph-Transducer für Biosensoranwendungen
JF  - 13. Jahrestagung der Biotechnologen : Wiesbaden 30.05. - 01.06.1995 / Deutsche Gesellschaft für Chemisches Apparatewesen, Chemische Technik und Biotechnologie e.V., Frankfurt am Main. - Bd. 1
Y1  - 1995
N1  - Jahrestagung der Biotechnologen <13, 1995, Wiesbaden> ; Deutsche Gesellschaft für Chemisches Apparatewesen, Chemische Technik und Biotechnologie
SP  - 65
EP  - 66
PB  - DECHEMA
CY  - Frankfurt am Main
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, Anette
A1  - Ruge, Christian
A1  - Ecken, Holger
A1  - Müller-Veggian, Mattea
A1  - Lüth, Hans
T1  - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
JF  - Sensors. 2 (2002), H. 1
N2  - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Y1  - 2002
SN  - 1424-8220
U6  - http://dx.doi.org/10.3390/s20100011
SP  - 11
EP  - 22
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, A.
A1  - Krings, T.
A1  - Lüth, H.
A1  - Wang, J.
T1  - Evaluation of a chip-based thin-film / thick-film sensor hybrid for (bio-)chemical analysis
JF  - Electroanalysis
Y1  - 2002
SN  - 1040-0397
VL  - 14
IS  - 13
SP  - 955
EP  - 958
ER  -