TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies JF - Sensors and Actuators B. 108 (2005), H. 1-2 Y1 - 2005 SN - 0925-4005 N1 - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004 SP - 986 EP - 992 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 554 EP - 555 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Yu.G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Pulsed laser deposition – an innovative technique for preparing inorganic thin films JF - Electroanalysis. 13 (2001), H. 8-9 Y1 - 2001 SN - 1040-0397 SP - 727 EP - 732 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Y. G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors? JF - Sensors and Actuators B. 78 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 N1 - Selected Papers form Eurosensors XIV SP - 273 EP - 278 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Y. G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Can pulsed laser deposition serve as an advanced technique in fabricating chemical sensors? JF - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...] Y1 - 2000 SN - 87-89935-50-0 N1 - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen) SP - 615 EP - 618 PB - MIC, Mikroelektronik Centret CY - Lyngby, Denmark ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Malkoc, Ü. A1 - Thust, M. A1 - Steffen, A. A1 - Kordos, P. A1 - Lüth, H. T1 - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors JF - Sensors and Actuators B. 65 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 288 EP - 290 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Malkoc, Ü. A1 - Thust, M. A1 - Steffen, A. A1 - Kordos, P. A1 - Lüth, H. T1 - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors JF - Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou Y1 - 1998 N1 - International Meeting on Chemical Sensors ; (7, 1998, Beijing) ; International Meeting on Chemical Sensors (IMCS) ; (7 : ; 1998.07.27-30 : ; Beijing) SP - 885 EP - 887 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Thust, M. T1 - Neue Ansätze für Chemo- und Biosensoren in Siliziumtechnik JF - Physikalische Blätter. 53 (1997), H. 5 Y1 - 1997 SN - 0031-9279 SP - 423 EP - 427 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Microfabricated semiconductor structures – Advances in (bio-)chemical sensing JF - Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed. Y1 - 2002 SN - 3-540-43699-5 SP - 79 EP - 92 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Novel concepts for silicon-based biosensors JF - Physica Status Solidi (A) (2001) Y1 - 2001 SN - 0031-8965 SP - 65 EP - 77 ER -