TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Näther, Niko
A1  - Auger, V.
A1  - Poghossian, Arshak
A1  - Koudelka-Hep, M.
T1  - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
JF  - Sensors and Actuators B. 108 (2005), H. 1-2
Y1  - 2005
SN  - 0925-4005
N1  - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004
SP  - 986
EP  - 992
ER  - 
TY  - CHAP
A1  - Platen, Johannes
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
T1  - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique
N2  - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
KW  - Biosensor
KW  - Nanostructuring
KW  - layer expansion
KW  - pattern-size reduction
KW  - self-aligned patterning
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477
ER  - 
TY  - JOUR
A1  - Poghossian, Arshak
A1  - Ingebrandt, S.
A1  - Yeung, C.-K.
A1  - Offenhäusser, A.
A1  - Schöning, Michael Josef
T1  - Microsensors based on ion-sensitive field-effect transistors for biomedical applications
JF  - Biomedizinische Technik. 49 (2004), H. 2
Y1  - 2004
SN  - 0932-4666
SP  - 1036
EP  - 1037
ER  - 
TY  - JOUR
A1  - Moritz, W.
A1  - Yoshinobu, T.
A1  - Finger, F.
A1  - Krause, S.
A1  - Xu, M.
A1  - Schöning, Michael Josef
T1  - Microscopy of impedance and surface ion concentrations
JF  - Biomedizinische Technik. 49 (2004), H. 2
Y1  - 2004
SN  - 0932-4666
SP  - 1000
EP  - 1001
ER  - 
TY  - JOUR
A1  - Leinhos, Marcel
A1  - Schusser, Sebastian
A1  - Bäcker, Matthias
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
T1  - Micromachined multi-parameter sensor chip for the control of polymer-degradation medium
JF  - Physica Status Solidi (A) : special issue on engineering and functional interfaces
N2  - It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium.
Y1  - 2014
U6  - http://dx.doi.org/10.1002/pssa.201330364
SN  - 1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)
VL  - 211
IS  - 6
SP  - 1346
EP  - 1351
PB  - Wiley-VCH
CY  - Weinheim
ER  - 
TY  - JOUR
A1  - Wagner, Torsten
A1  - Miyamoto, Ko-ichiro
A1  - Shigihara, Noriko
A1  - Schöning, Michael Josef
A1  - Yoshinobu, Tatsuo
T1  - Microfluidic systems with free definable sensor spots by an integrated light-addressable potentiometric sensor
JF  - Procedia Engineering. 25 (2011)
Y1  - 2011
SN  - 1877-7058
N1  - EurosensorsXXV ; Proc. Eurosensors XXV, September 4-7, 2011, Athens, Greece
SP  - 791
EP  - 794
PB  - Elsevier
CY  - Amsterdam
ER  - 
TY  - JOUR
A1  - Bäcker, Matthias
A1  - Raue, Markus
A1  - Schusser, Sebastian
A1  - Jeitner, C.
A1  - Breuer, L.
A1  - Wagner, P.
A1  - Poghossian, Arshak
A1  - Förster, Arnold
A1  - Mang, Thomas
A1  - Schöning, Michael Josef
T1  - Microfluidic chip with integrated microvalves based on temperature- and pH-responsive hydrogel thin films
JF  - Physica Status Solidi  (a)
N2  - Two types of microvalves based on temperature-responsive poly(N-isopropylacrylamide) (PNIPAAm) and pH-responsive poly(sodium acrylate) (PSA) hydrogel films have been developed and tested. The PNIPAAm and PSA hydrogel films were prepared by means of in situ photopolymerization directly inside the fluidic channel of a microfluidic chip fabricated by combining Si and SU-8 technologies. The swelling/shrinking properties and height changes of the PNIPAAm and PSA films inside the fluidic channel were studied at temperatures of deionized water from 14 to 36 °C and different pH values (pH 3–12) of Titrisol buffer, respectively. Additionally, in separate experiments, the lower critical solution temperature (LCST) of the PNIPAAm hydrogel was investigated by means of a differential scanning calorimetry (DSC) and a surface plasmon resonance (SPR) method. Mass-flow measurements have shown the feasibility of the prepared hydrogel films to work as an on-chip integrated temperature- or pH-responsive microvalve capable to switch the flow channel on/off.
Y1  - 2012
U6  - http://dx.doi.org/10.1002/pssa.201100763
SN  - 1862-6319
VL  - 209
IS  - 5
SP  - 839
EP  - 845
PB  - Wiley-VCH
CY  - Weinheim
ER  - 
TY  - JOUR
A1  - Arida, Hassan
A1  - Mohsen, Q.
A1  - Schöning, Michael Josef
T1  - Microfabrication, characterization and analytical application of a new thin-film silver microsensor
JF  - Electrochimica Acta. 54 (2009), H. 13
Y1  - 2009
SN  - 0013-4686
SP  - 3543
EP  - 3547
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Microfabricated semiconductor structures – Advances in (bio-)chemical sensing
JF  - Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.
Y1  - 2002
SN  - 3-540-43699-5
SP  - 79
EP  - 92
PB  - Springer
CY  - Berlin [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
T1  - Microelectronics contacts (bio-)chemistry – Semiconductor-based sensors
JF  - Biologi Italiani. 8 (2001)
Y1  - 2001
SN  - 0392-2510
SP  - 5
EP  - 10
ER  -