TY  - JOUR
A1  - Mohnke, Andreas
T1  - High-rate sputtering of zinc oxide with a funnel-shaped magnetic field: Effect of the target thickness on the layer properties
JF  - Vakuum-Technik. 36 (1987), H. 5
Y1  - 1987
SN  - 0042-2266
N1  - unter 63 ZS 073-1986/87 in der Bibliothek Jülich vorhanden
SP  - 148
EP  - 151
ER  -