TY - JOUR A1 - Förster, Arnold A1 - Malindretos, Jörg A1 - Indlekofer, Klaus Michael A1 - Lepsa, Mihail Ion T1 - Homogeneity analysis of ion-implanted resonant tunnelling diodes for applications in digital logic circuits. Malindretos, Jörg; Förster, Arno; Indlekofer, Klaus Michael; Lepsa, Mihail Ion; Hardtdegen, Hilde; Schmidt, Roland; Luth, Hans JF - Superlattices and Microstructures. 31 (2002), H. 6 Y1 - 2002 SN - 0749-6036 SP - 315 EP - 325 ER -