TY - JOUR A1 - Prume, Klaus A1 - Raeder, H. A1 - Tyholdt, F. A1 - Booij, W. E. T1 - Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P. JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 357 EP - 362 ER - TY - JOUR A1 - Prume, Klaus A1 - Gerber, Peter A1 - Kügeler, Carsten A1 - Roelofs, Andreas T1 - Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen, Y1 - 2004 SN - 0-7803-8410-5 N1 - 14th IEEE International Symposium on Applications of Ferroelectrics, 2004. ISAF-04. 2004 SP - 7 EP - 10 ER - TY - JOUR A1 - Prume, Klaus A1 - Muralt, P. A1 - Calame, F. A1 - Schmitz-Kempen, T. T1 - Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ; JF - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1 Y1 - 2007 SN - 0885-3010 SP - 81 EP - 14 ER - TY - JOUR A1 - Prume, Klaus A1 - Franken, Klaus A1 - Böttger, Ulrich A1 - Waser, Rainer T1 - Modelling and numerical simulation of the electrical, mechanical, and thermal coupled behaviour of Multilayer capacitors (MLCs) / Prume, Klaus ; Franken, Klaus ; Böttger, Ulrich ; Waser, Rainer ; Maier, Horst R. JF - Journal of the European Ceramic Society. 22 (2002), H. 8 Y1 - 2002 SN - 0955-2219 SP - 1285 EP - 1296 ER - TY - BOOK A1 - Prume, Klaus T1 - Modellierung und Simulation der elektrisch-thermisch-mechanisch gekoppelten Eigenschaften keramischer Vielschichtstrukturen Y1 - 2001 SN - 3-8265-8309-4 N1 - Zugl.: Aachen, Techn. Hochschul., Diss., 2001; Berichte aus der Elektrotechnik PB - Shaker CY - Aachen ER - TY - JOUR A1 - Prume, Klaus A1 - Reichenberg, B. A1 - Roelofs, A. A1 - Waser, R. T1 - In-situ compensation of the parasitic capacitance for nanoscale hysteresis measurements / Schmitz, T. ; Prume, K. ; Reichenberg, B. ; Roelofs, A. ; Waser, R. ; Tiedke, S. JF - Journal of the European Ceramic Society. 24 (2004), H. 6 Y1 - 2004 SN - 0955-2219 N1 - Electroceramics VIII SP - 1145 EP - 1147 ER - TY - JOUR A1 - Prume, Klaus A1 - Waser, Rainer T1 - Finite-element simulation of coupled characteristics of ceramic multilayer capacitors under transient electrical loading / Prume, Klaus ; Waser, Rainer JF - Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics. Vol. 2 Y1 - 2000 N1 - ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics SP - 675 EP - 678 ER - TY - JOUR A1 - Prume, Klaus A1 - Waser, Rainer A1 - Franken, Klaus A1 - Maier, Horst R. T1 - Finite-Element Analysis of Ceramic Multilayer Capacitors: Modeling and Electrical Impedance Spectroscopy for a Nondestructive Failure Test / Prume, Klaus ; Waser, Rainer ; Franken, Klaus ; Maier, Horst R. ; JF - Journal of the American Ceramic Society. 83 (2000), H. 5 Y1 - 2000 SN - 0002-7820 SP - 1153 EP - 1159 ER - TY - JOUR A1 - Prume, Klaus A1 - Franken, Klaus A1 - Maier, Horst R. A1 - Waser, Rainer T1 - Finite-Element Analysis of Ceramic Multilayer Capacitors: Failure Probability Caused by Wave Soldering and Bending Loads / Franken, Klaus ; Maier, Horst R. ; Prume, Klaus ; Waser, Rainer JF - Journal of the American Ceramic Society. 83 (2000), H. 6 Y1 - 2000 SN - 0002-7820 SP - 1433 EP - 1440 ER - TY - JOUR A1 - Prume, Klaus A1 - Muralt, Paul A1 - Calame, Florian A1 - Schmitz-Kempen, Thorsten T1 - Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 407 EP - 411 ER -