TY  - CHAP
A1  - Platen, Johannes
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
T1  - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique
N2  - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
KW  - Biosensor
KW  - Nanostructuring
KW  - layer expansion
KW  - pattern-size reduction
KW  - self-aligned patterning
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Abouzar, Maryam H.
A1  - Ingebrandt, Sven
A1  - Platen, Johannes
A1  - Offenhäusser, Andreas
A1  - Poghossian, Arshak
ED  - Comini, Elisabetta
T1  - Towards label-free detection of charged macromolecules using field-effect-based structures : Scaling down from capacitive EIS sensor over ISFET to nano-scale devices
JF  - Nanostructured materials and hybrid composites for gas sensors and biomedical applications : symposium held April 18-20, 2006, San Francisco , California, U.S.A.
Y1  - 2006
SN  - 9781558998711
IS  - paper 0915-R05-04
SP  - 89
EP  - 94
ER  -